Showerhead for vapor deposition

ABSTRACT

Embodiments of the invention generally relate to apparatuses for chemical vapor deposition (CVD) processes. In one embodiment, a showerhead assembly is provided which includes a body having a centralized channel extending through upper and lower portions of the body and extending parallel to a central axis of the body. The showerhead assembly contains an optional diffusion plate having a first plurality of holes and disposed within the centralized channel, an upper tube plate having a second plurality of holes and disposed within the centralized channel below the diffusion plate, a lower tube plate having a third plurality of holes and disposed within the centralized channel below the upper tube plate, and a plurality of tubes extending from the upper tube plate to the lower tube plate. Each tube is coupled to and in fluid communication with individual holes of the upper and lower tube plates.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims benefit of U.S. Provisional Application Nos.61/160,690, 61/160,694, 61/160,696, 61/160,699, 61/160,700, 61/160,701,and 61/160,703, all of which were filed Mar. 16, 2009, and all of whichare hereby incorporated by reference in their entirety.

BACKGROUND OF THE INVENTION

1. Field of the Invention

Embodiments of the invention generally relate to apparatuses and methodsfor vapor deposition, and more particularly, to chemical vapordeposition systems, reactors, and processes thereof.

2. Description of the Related Art

Photovoltaic or solar devices, semiconductor devices, or otherelectronic devices are usually manufactured by utilizing a variety offabrication processes to manipulate the surface of a substrate. Thesefabrication processes may include deposition, annealing, etching,doping, oxidation, nitridation, and many other processes. Epitaxial liftoff (ELO) is a less common technique for fabricating thin film devicesand materials in which layers of materials are deposited to and thenremoved from a growth substrate. An epitaxial layer, film, or materialis grown or deposited on a sacrificial layer which is disposed on thegrowth substrate, such as a gallium arsenide wafer, by a chemical vapordeposition (CVD) process or a metallic-organic CVD (MOCVD) process.Subsequently, the sacrificial layer is selectively etched away in a wetacid bath, while the epitaxial material is separated from the growthsubstrate during the ELO etch process. The isolated epitaxial materialmay be a thin layer or film which is usually referred to as the ELO filmor the epitaxial film. Each epitaxial film generally contains numerouslayers of varying compositions relative to the specific device, such asphotovoltaic or solar devices, semiconductor devices, or otherelectronic devices.

The CVD process includes growing or depositing the epitaxial film by thereaction of vapor phase chemical precursors. During a MOCVD process, atleast one of the chemical precursors is a metallic-organic compound—thatis—a compound having a metal atom and at least one ligand containing anorganic fragment.

There are numerous types of CVD reactors for very differentapplications. For example, CVD reactors include single or bulk waferreactors, atmospheric and low pressure reactors, ambient temperature andhigh temperature reactors, as well as plasma enhanced reactors. Thesedistinct designs address a variety of challenges that are encounteredduring a CVD process, such as depletion effects, contamination issues,reactor maintenance, throughput, and production costs.

Therefore, there is a need for CVD systems, reactors, and processes togrow epitaxial films and materials on substrates more effectively withless contamination, higher throughput, and less expensive than bycurrently known CVD equipment and processes.

SUMMARY OF THE INVENTION

Embodiments of the invention generally relate to apparatuses and methodsfor chemical vapor deposition (CVD) processes. In another embodiment, ashowerhead assembly for a vapor deposition chamber is provided whichincludes a body having an upper portion and a lower portion, acentralized channel extending through the upper and lower portions ofthe body, between inner surfaces of the body, and parallel to a centralaxis extending through the body, and an optional diffusion plate havinga first plurality of holes and disposed within the centralized channel.The showerhead assembly further has an upper tube plate having a secondplurality of holes and disposed within the centralized channel below thediffusion plate, a lower tube plate having a third plurality of holesand disposed within the centralized channel below the upper tube plate,and a plurality of tubes extending from the upper tube plate to thelower tube plate, wherein each tube is coupled to and in fluidcommunication with an individual hole from the second plurality of holesand an individual hole from the third plurality of holes.

In another embodiment, a showerhead assembly for a vapor depositionchamber is provided which includes a body containing an upper portionand a lower portion, wherein the upper portion contains a flangeextending over the lower portion, a centralized channel extendingthrough the upper and lower portions of the body, between inner surfacesof the body, and parallel to a central axis extending through the body,an optional diffusion plate having a first plurality of holes anddisposed within the centralized channel, an upper tube plate having asecond plurality of holes and disposed within the centralized channelbelow the diffusion plate, a lower tube plate having a third pluralityof holes and disposed within the centralized channel below the uppertube plate, and a plurality of tubes extending from the upper tube plateto the lower tube plate, wherein each tube is coupled to and in fluidcommunication with an individual hole from the second plurality of holesand an individual hole from the third plurality of holes.

In another embodiment, a showerhead assembly for a vapor depositionchamber is provided which includes a body containing an upper portionand a lower portion, wherein the upper portion adjacently extends from acentral axis of the body further than the lower portion and the lowerportion extends parallel to the central axis further than the upperportion, a centralized channel extending through the upper and lowerportions of the body, between inner surfaces of the body, and parallelto the central axis, an optional diffusion plate having a firstplurality of holes and disposed within the centralized channel, an uppertube plate having a second plurality of holes and disposed within thecentralized channel below the diffusion plate, a lower tube plate havinga third plurality of holes and disposed within the centralized channelbelow the upper tube plate, and a plurality of tubes extending from theupper tube plate to the lower tube plate, wherein each tube is coupledto and in fluid communication with an individual hole from the secondplurality of holes and an individual hole from the third plurality ofholes.

In another embodiment, a showerhead assembly for a vapor depositionchamber is provided which includes a body containing an upper portionand a lower portion, a centralized channel extending through the upperand lower portions of the body, between inner surfaces of the body, andparallel to a central axis extending through the body, an optionaldiffusion plate having a first plurality of holes and disposed withinthe centralized channel, an upper tube plate having a second pluralityof holes and disposed within the centralized channel below the diffusionplate, and a lower tube plate having a third plurality of holes anddisposed within the centralized channel below the upper tube plate.

In another embodiment, a showerhead assembly for a vapor depositionchamber is provided which includes a body containing an upper portionand a lower portion, a centralized channel extending through the upperand lower portions of the body, between inner surfaces of the body, andparallel to a central axis extending through the body, an upper tubeplate having a first plurality of holes and disposed within thecentralized channel below the diffusion plate, a lower tube plate havinga second plurality of holes and disposed within the centralized channelbelow the upper tube plate, and a plurality of tubes extending from theupper tube plate to the lower tube plate, wherein each tube is coupledto and in fluid communication with an individual hole from the firstplurality of holes and an individual hole from the second plurality ofholes.

In some embodiments, the showerhead assembly is a modular showerheadassembly. The upper portion and the lower portion of the body showerheadassembly may independently contain a material such as steel, stainlesssteel, 300 series stainless steel, iron, nickel, chromium, molybdenum,aluminum, alloys thereof, or combinations thereof. In one example, theupper portion and the lower portion of the body each independentlycontains stainless steel or alloys thereof.

In one embodiment, the showerhead assembly contains a gaseous inletdisposed on the upper portion of the body. A plate may be disposed on anupper surface of the upper portion of the body and the gaseous inlet maybe disposed on the plate. The plate may contain a material such assteel, stainless steel, 300 series stainless steel, iron, nickel,chromium, molybdenum, aluminum, alloys thereof, or combinations thereof.In some examples, the plate has an inlet port extending therethrough.The gaseous inlet has an inlet tube extending through the inlet port. Anozzle may be coupled to one end of the inlet tube and disposed abovethe plate. In another example, the upper surface of the upper portion ofthe showerhead body has a groove which encompasses the centralizedchannel. An O-ring may be disposed within the groove. The diffusionplate may be disposed on a ledge or a flange protruding from sidesurfaces of the body within the centralized channel.

In one embodiment, the plurality of tubes may have tubes numberingwithin a range from about 500 tubes to about 1,500 tubes, preferably,from about 700 tubes to about 1,200 tubes, and more preferably, fromabout 800 tubes to about 1,000 tubes. In some examples, each tube mayhave a length within a range from about 0.5 cm to about 2 cm,preferably, from about 0.8 cm to about 1.2 cm, for example, about 1 cm.In other examples, each tube may have a diameter within a range fromabout 0.005 inches to about 0.05 inches, preferably, from about 0.01inches to about 0.03 inches. In some examples, the tubes are hypodermicneedles. The tubes may contain or be made from a material such as steel,stainless steel, 300 series stainless steel, iron, nickel, chromium,molybdenum, aluminum, alloys thereof, or combinations thereof.

In one embodiment, each hole of the first plurality of holes on thediffusion plate has a larger diameter than each hole of the secondplurality of holes on the upper tube plate. Further, each hole of thefirst plurality of holes on the diffusion plate has a larger diameterthan each hole of the third plurality of holes on the lower diffusionplate. Also, each hole of the second plurality of holes on the uppertube plate has the same diameter or substantially the same diameter aseach hole of the third plurality of holes on the lower tube plate.

In one embodiment, the diffusion plate may contain or be made from amaterial such as steel, stainless steel, 300 series stainless steel,iron, nickel, chromium, molybdenum, aluminum, alloys thereof, orcombinations thereof. The diffusion plate may contain holes numberingwithin a range from about 20 holes to about 200 holes, preferably, fromabout 25 holes to about 75 holes, and more preferably, from about 40holes to about 60 holes. Each hole of the diffusion plate may have adiameter within a range from about 0.005 inches to about 0.05 inches,preferably, from about 0.01 inches to about 0.03 inches. In anotherembodiment, the upper tube plate and/or the lower tube plate mayindependently contain or be independently made from a material such assteel, stainless steel, 300 series stainless steel, iron, nickel,chromium, molybdenum, aluminum, alloys thereof, or combinations thereof.The upper tube plate and/or the lower tube plate may independently havefrom about 500 holes to about 1,500 holes, preferably, from about 700holes to about 1,200 holes, and more preferably, from about 800 holes toabout 1,000 holes. Each hole of the upper tube plate and/or the lowertube plate may independently have a diameter within a range from about0.005 inches to about 0.05 inches, preferably, from about 0.01 inches toabout 0.03 inches.

In one example, the upper surface of the upper portion of the body ofthe showerhead assembly is a metallic plate. In other examples, theshowerhead assembly body may have a rectangular geometry or a squaregeometry. In another embodiment, the body of the showerhead assemblyfurther contains a temperature regulation system. The temperatureregulation system may have a fluid passageway extending within the body,and may have an inlet and an outlet coupled to and in fluidcommunication with the fluid passageway. The inlet and the outlet may beindependently coupled to and in fluid communication with a liquidreservoir, a heat exchanger, or multiple heat exchangers.

In other embodiments, an exhaust assembly for a vapor deposition chamberis provided which includes a body containing an upper portion disposedon a lower portion, a centralized channel extending through the upperand lower portions of the body, between inner surfaces of the body, andparallel to a central axis extending through the body, an exhaust outletdisposed on the upper portion of the body, an optional diffusion platehaving a first plurality of holes and disposed within the centralizedchannel, an upper tube plate having a second plurality of holes anddisposed within the centralized channel below the diffusion plate, alower tube plate having a third plurality of holes and disposed withinthe centralized channel below the upper tube plate, and a plurality oftubes extending from the upper tube plate to the lower tube plate,wherein each tube is coupled to and in fluid communication with anindividual hole from the second plurality of holes and an individualhole from the third plurality of holes.

The exhaust assembly may further contain a plate disposed on an uppersurface of the upper portion of the body. The exhaust outlet may bedisposed on the plate. The plate may contain or be made from a materialsuch as steel, stainless steel, 300 series stainless steel, iron,nickel, chromium, molybdenum, aluminum, alloys thereof, or combinationsthereof. The plate usually has an exhaust port extending therethrough.The exhaust outlet may have an exhaust tube extending through theexhaust port. In one example, an exhaust nozzle may be coupled to oneend of the exhaust tube and disposed above the plate. In anotherexample, the upper surface of the upper portion of the exhaust assemblybody has a groove which encompasses the centralized channel. An O-ringor other spacer may be disposed within the groove. The diffusion platemay be disposed on a ledge or a flange protruding from side surfaces ofthe body within the centralized channel.

BRIEF DESCRIPTION OF THE DRAWINGS

So that the manner in which the above recited features of the inventioncan be understood in detail, a more particular description of theinvention, briefly summarized above, may be had by reference toembodiments, some of which are illustrated in the appended drawings. Itis to be noted, however, that the appended drawings illustrate onlytypical embodiments of this invention and are therefore not to beconsidered limiting of its scope, for the invention may admit to otherequally effective embodiments.

FIGS. 1A-1E depict a CVD reactor according to embodiments describedherein;

FIG. 1F depicts a CVD reactor coupled to a temperature regulation systemaccording to another embodiment described herein;

FIGS. 2A-2C depict a reactor lid assembly according to embodimentsdescribed herein;

FIG. 2D depicts a reactor lid support according to an embodimentdescribed herein;

FIG. 3 depicts a reactor body assembly according to embodimentsdescribed herein;

FIGS. 4A-4E depict a wafer carrier track according to embodimentsdescribed herein;

FIGS. 5A-5D depict an isolator assembly according to embodimentsdescribed herein;

FIG. 6 depicts a heating lamp assembly according to embodimentsdescribed herein;

FIGS. 7A-7D depict a showerhead assembly according to embodimentsdescribed herein;

FIGS. 8A-8D depict an exhaust assembly according to embodimentsdescribed herein;

FIGS. 9A-9F depict a CVD system containing multiple CVD reactorsaccording to embodiments described herein;

FIGS. 10A-10B depict lamps according to embodiments described herein;

FIGS. 11A-11F depict a plurality of lamps according to other embodimentsdescribed herein;

FIGS. 12A-12B depict a levitating substrate carrier according to anotherembodiment described herein; and

FIGS. 12C-12E depict other levitating substrate carriers according toanother embodiment described herein.

DETAILED DESCRIPTION

Embodiments of the invention generally relate to an apparatus andmethods of chemical vapor deposition (CVD), such as metallic-organic CVD(MOCVD) processes. As set forth herein, embodiments of the invention aredescribed as they relate to an atmospheric pressure CVD reactor andmetal-organic precursor gases. It is to be noted, however, that aspectsof the invention are not limited to use with an atmospheric pressure CVDreactor or metal-organic precursor gases, but are applicable to othertypes of reactor systems and precursor gases. To better understand thenovelty of the apparatuses of the invention and the methods of usethereof, reference is hereafter made to the accompanying drawings.

According to one embodiment of the invention, an atmospheric pressureCVD reactor is provided. The CVD reactor may be used to provide multipleepitaxial layers on a substrate, such as a gallium arsenide substrate.These epitaxial layers may include aluminum gallium arsenide, galliumarsenide, and phosphorous gallium arsenide. These epitaxial layers maybe grown on the gallium arsenide substrate for later removal so that thesubstrate may be reused to generate additional materials. In oneembodiment, the CVD reactor may be used to provide solar cells. Thesesolar cells may further include single junction, hetero-junction, orother configurations. In one embodiment, the CVD reactor may beconfigured to develop a 2.5 watt wafer on a 10 centimeter by 10centimeter substrate. In one embodiment, the CVD reactor may provide athroughput range of about 1 substrate per minute to about 10 substratesper minute.

FIGS. 1A-1E depict reactor 100, a CVD reactor or chamber, as describedin an embodiment described herein. Reactor 100 contains reactor lidassembly 200 disposed on reactor body assembly 102. Reactor lid assembly200 and components thereof are further illustrated in FIGS. 2A-2D andreactor body assembly 102 is further illustrated in FIG. 3.

Reactor lid assembly 200 contains an injector or isolator, isolatorassembly 500, disposed between two showerheads, showerhead assemblies700. Reactor lid assembly 200 also contains exhaust assembly 800. FIG.1C depicts reactor 100 containing two deposition stations, such aschamber stations 160, 162. Chamber station 160 contains showerheadassembly 700 and isolator assembly 500 while chamber station 162contains showerhead assembly 700 and exhaust assembly 800. In oneembodiment, isolator assembly 500 may be used to flow gas to separateboth showerhead assemblies 700 from each other, while exhaust assembly800 may be used to isolate the internal environment of reactor 100 fromanother reactor connected to faceplate 112.

In many embodiments described herein, each of the showerhead assemblies700 may be a modular showerhead assembly, each of the isolatorassemblies 500 may be a modular isolator assembly, and each of theexhaust assemblies 800 may be a modular exhaust assembly. Any of theshowerhead assemblies 700, the isolator assemblies 500, and/or theexhaust assemblies 800 may be removed from reactor lid assembly 200, andreplaced with the same or a different assembly as desired for theparticular process conditions. The modular assemblies of the showerheadassemblies 700, the isolator assemblies 500, and/or the exhaustassemblies 800 may independently be configured for positioning within aCVD reactor system.

In alternative embodiments described herein, other configurations ofreactor 100 are provided, but not illustrated in the drawings. In oneembodiment, reactor lid assembly 200 of reactor 100 contains threeexhaust assemblies 800 separated by two showerhead assemblies 700 sothat reactor lid assembly 200 sequentially contain a first exhaustassembly, a first showerhead assembly, a second exhaust assembly, asecond showerhead assembly, and a third exhaust assembly. In anotherembodiment, reactor lid assembly 200 of reactor 100 contains threeisolator assemblies 500 separated by two showerhead assemblies 700 sothat reactor lid assembly 200 sequentially contain a first isolatorassembly, a first showerhead assembly, a second isolator assembly, asecond showerhead assembly, and a third isolator assembly.

In another embodiment, reactor lid assembly 200 of reactor 100 containstwo isolator assemblies 500 and one exhaust assembly 800 separated bytwo showerhead assemblies 700 so that reactor lid assembly 200sequentially contains a first isolator assembly, a first showerheadassembly, a second isolator assembly, a second showerhead assembly, anda first exhaust assembly. In another example, reactor lid assembly 200may sequentially contain a first isolator assembly, a first showerheadassembly, a first exhaust assembly, a second showerhead assembly, and asecond isolator assembly. In another example, reactor lid assembly 200may sequentially contain a first exhaust assembly, a first showerheadassembly, a first isolator assembly, a second showerhead assembly, and asecond isolator assembly.

In another embodiment, reactor lid assembly 200 of reactor 100 containstwo exhaust assemblies 800 and one isolator assembly 500 separated bytwo showerhead assemblies 700 so that reactor lid assembly 200sequentially contains a first exhaust assembly, a first showerheadassembly, a second exhaust assembly, a second showerhead assembly, and afirst isolator assembly. In another example, reactor lid assembly 200may sequentially contain a first exhaust assembly, a first showerheadassembly, a first isolator assembly, a second showerhead assembly, and asecond exhaust assembly. In another example, reactor lid assembly 200may sequentially contain a first isolator assembly, a first showerheadassembly, a first exhaust assembly, a second showerhead assembly, and asecond exhaust assembly.

Reactor body assembly 102 contains faceplate 110 on one end andfaceplate 112 on the opposite end. Faceplates 110 and 112 may eachindependently be utilized to couple together additional reactors,similar or different than reactor 100, or to couple an end cap, an endplate, a wafer/substrate handler, or another device. In one example,faceplate 110 of reactor 100 may be coupled to faceplate 112 of anotherreactor (not shown). Similar, faceplate 112 of reactor 100 may becoupled to faceplate 110 of another reactor (not shown). A seal, spacer,or O-ring may be disposed between two joining faceplates. In oneembodiment, the seal may contain a metal, such as nickel or a nickelalloy. In one example, the seal is a knife edge metal seal. In anotherembodiment, the seal contains a polymer or an elastomer, such as aKALREZ® elastomer seal, available from DuPont Performance ElastomersL.L.C. In another embodiment, the seal may be a helix seal or an H-seal.The seal or O-ring should form a gas tight seal to prevent, or greatlyreduce ambient gas from entering reactor 100. Reactor 100 may bemaintained with little or no oxygen, water, or carbon dioxide during useor production. In one embodiment, reactor 100 may be maintained with anoxygen concentration, a water concentration, and/or a carbon dioxideconcentration independently of about 100 ppb (parts per billion) orless, preferably, about 10 ppb or less, more preferably, about 1 ppb orless, and more preferably, about 100 ppt (parts per trillion) or less.

Sides 120 and 130 extend along the length of reactor body assembly 102.Side 120 has upper surface 128 and side 130 has upper surface 138. Uppersurfaces 114 and 116 of reactor body assembly 102 extend between uppersurfaces 128 and 138. Upper surface 114 is on reactor body assembly 102just inside and parallel to faceplate 110 and upper surface 116 is onreactor body assembly 102 just inside and parallel to faceplate 112. Gasinlet 123 is coupled to and extends from side 120. The levitation gas orcarrier gas may be administered into reactor 100 through gas inlet 123.The levitation gas or carrier gas may contain nitrogen, helium, argon,hydrogen, or mixtures thereof.

FIG. 1F depicts reactor 100, including reactor body assembly 102 andreactor lid assembly 200, coupled to temperature regulation system 190,according to one embodiment described herein. Temperature regulationsystem 190 is illustrated in FIG. 1F as having three heat exchangers 180a, 180 b, and 180 c. However, temperature regulation system 190 may have1, 2, 3, 4, 5, or more heat exchangers coupled to and in fluidcommunication with the various portions of reactor 100. Each of the heatexchangers 180 a, 180 b, or 180 c may contain at least one liquid supply182 and at least one liquid return 184. Each liquid supply 182 may becoupled to and in fluid communication with inlets on reactor 100 byconduit 186 while each liquid return 184 may be coupled to and in fluidcommunication with outlets on reactor 100 by conduit 186. Conduits 186may include pipes, tubing, hoses, other hollow lines, or combinationsthereof. Valve 188 may be used on each conduit 186 between liquid supply182 and an inlet or between liquid return 184 and an outlet.

Reactor body assembly 102 is coupled to and in fluid communication withat least one heat exchanger as part of the heat regulation system. Insome embodiments, reactor body assembly 102 may be coupled to and influid communication with two, three, or more heat exchangers. FIG. 1Bdepicts inlet 118 a and outlet 118 b coupled to and in fluidcommunication with lower portion 104 of reactor 100 and with the heatregulation system.

In one embodiment, inlets 122 a, 122 b, and 122 c, and outlets 126 a,126 b, and 126 c are coupled to and extend from side 120. At least oneheat exchanger is coupled to and in fluid communication with inlets 122a, 122 b, and 122 c, and outlets 126 a, 126 b, and 126 c. Inlets 122 a,122 b, and 122 c may receive a liquid from the heat exchangers whileoutlets 126 a, 126 b, and 126 c send the liquid back to the heatexchanger. In one embodiment, each inlet 122 a, 122 b, or 122 c ispositioned in a lower position than each respective outlet 126 a, 126 b,or 126 c, so that flowing liquid from each inlet 122 a, 122 b, or 122 cupwardly flows through each connecting passageway to each respectiveoutlet 126 a, 126 b, or 126 c.

In another embodiment, inlets 132 a, 132 b, and 132 c, and outlets 136a, 136 b, and 136 c are coupled to and extend from side 130. At leastone heat exchanger is coupled to and in fluid communication with inlets132 a, 132 b, and 132 c, and outlets 136 a, 136 b, and 136 c. Inlets 132a, 132 b, and 132 c may receive a liquid from the heat exchanger whileoutlets 136 a, 136 b, and 136 c send the liquid back to the heatexchanger.

FIGS. 1C-1D illustrate reactor body assembly 102 containing fluidpassageways 124 a, 124 b, 124 c, 134 a, 134 b, and 134 c. In oneexample, fluid passageway 124 a extends within side 120 and along apartial length of reactor body assembly 102. Fluid passageway 124 a iscoupled to and in fluid communication with inlet 122 a and outlet 126 a.Also, fluid passageway 134 a extends within side 130 and along a partiallength of reactor body assembly 102. Fluid passageway 134 a is coupledto and in fluid communication with inlet 132 a and outlet 136 a.

In another example, fluid passageway 124 b extends within the shelf orbracket arm 146 within reactor body assembly 102 and along a partiallength of reactor body assembly 102. Fluid passageway 124 b is coupledto and in fluid communication with inlet 122 b and outlet 126 b. Also,fluid passageway 134 b extends within the shelf or bracket arm 146within reactor body assembly 102 and along a partial length of reactorbody assembly 102. Fluid passageway 134 b is coupled to and in fluidcommunication with inlet 132 b and outlet 136 b.

In another example, fluid passageway 124 c extends from side 120,through the width of reactor body assembly 102, and to side 130. Fluidpassageway 124 c is coupled to and in fluid communication with inlet 122c and outlet 132 c. Also, fluid passageway 124 c extends from side 130,through the width of reactor body assembly 102, and to side 130. Fluidpassageway 124 c is coupled to and in fluid communication with inlet 126c and outlet 136 c.

In another embodiment, reactor body assembly 102 contains wafer carriertrack 400 and heating lamp assembly 600 disposed therein. Heating lampsystem may be used to heat wafer carrier track 400, wafer carriers, andwafers 90 disposed above and within reactor 100. Wafer carrier track 400may be on a shelf, such as bracket arm 146. Generally, wafer carriertrack 400 may be disposed between bracket arm 146 and clamp arm 148.Bracket arm 146 may contains fluid passageways 124 b and 134 btraversing therethrough.

In one embodiment, a spacer, such as a gasket or an O-ring may bedisposed between the lower surface of wafer carrier track 400 and theupper surface of bracket arm 146. Also, another spacer, such as a gasketor an O-ring may be disposed between the upper surface of wafer carriertrack 400 and the lower surface of clamp arm 148. The spacers may beused to form space or a gap around wafer carrier track 400, which aidsin the thermal management of wafer carrier track 400. In one example,the upper surface of bracket arm 146 may have a groove for containing aspacer. Similarly, the lower surface of clamp arm 148 may have a groovefor containing a spacer.

FIGS. 2A-2C depict reactor lid assembly 200 according to anotherembodiment described herein. Reactor lid assembly 200 containsshowerhead assembly 700 and isolator assembly 500 (chamber station 160)and showerhead assembly 700 and exhaust assembly 800 (chamber station162) disposed on lid support 210. FIG. 2D depicts lid support 210contained within reactor lid assembly 200, as described in oneembodiment. Lid support 210 has lower surface 208 and upper surface 212.Flange 220 extends outwardly from lid support 210 and has lower surface222. Flange 220 helps support reactor lid assembly 200 when disposed onreactor body assembly 102. Lower surface 222 of flange 220 may be inphysical contact with upper surfaces 114, 116, 128, and 138 of reactorbody assembly 102.

In one embodiment, showerhead assemblies 700 may be disposed withinshowerhead ports 230 and 250 of lid support 210, isolator assembly 500may be disposed within isolator port 240 of lid support 210, and exhaustassembly 800 may be disposed within exhaust port 260 of lid support 210.The geometry of the gas or exhaust assembly generally matches thegeometry of the respective port. Each showerhead assembly 700 andshowerhead ports 230 and 250 may independently have a rectangular orsquare geometry. A process path—such as the path in which levitatingwafer carrier 480 travels forward along wafer carrier track 400 duringfabrication processes—extends along the length of lid support 210 aswell as wafer carrier track 400.

Showerhead port 230 has length 232 and width 234 and showerhead port 250has length 252 and width 254. Isolator assembly 500 and isolator port240 may independently have a rectangular or square geometry. Isolatorport 240 has length 242 and width 244. Exhaust assembly 800 and exhaustport 260 may independently have a rectangular or square geometry.Exhaust port 260 has length 262 and width 264.

The process path extends along length 232 of showerhead port 230 and afirst showerhead assembly therein, extends along length 242 of isolatorport 240 and an isolator assembly therein, extends along length 252 ofshowerhead port 250 and a second showerhead assembly therein, andextends along length 262 of exhaust port 260 and an exhaust assemblytherein. Also, the process path extends perpendicular or substantiallyperpendicular to width 234 of showerhead port 230 and a first showerheadassembly therein, to width 244 of isolator port 240 and an isolatorassembly therein, to width 254 of showerhead port 250 and a secondshowerhead assembly therein, and to width 264 of exhaust port 260 and anexhaust assembly therein.

In some examples, the first showerhead assembly 700, the isolatorassembly 500, the second showerhead assembly 700, and the exhaustassembly 800 are consecutively disposed next to each and along a processpath which extends along the length of lid support. The isolatorassembly 500, as well as the exhaust assembly 800 may each have a widthwhich is substantially the same or greater than the width of the processpath. Also, the isolator assembly 500 or the exhaust assembly 800 mayindependently have a width which is substantially the same or greaterthan the width of the first and second showerhead assemblies 700.

In one embodiment, showerhead assemblies 700 independently have a squaregeometry and isolator assembly 500 and exhaust assembly 800 have asquare geometry. In one example, width 244 of isolator port 240 and thewidth of isolator assembly 500 may extend across the width of theinterior of the chamber. In another example, width 264 of exhaust port260 and the width of exhaust assembly 800 may extend across the width ofthe interior of the chamber.

In some embodiments, width 234 of showerhead port 230, width 254 ofshowerhead port 250, and the width of each showerhead assembly 700 mayindependently be within a range from about 3 inch to about 9 inches,preferably, from about 5 inches to about 7 inches, for example, about 6inches. Also, length 232 of showerhead port 230, length 252 ofshowerhead port 250 and the length of each showerhead assembly 700 mayindependently be within a range from about 3 inch to about 9 inches,preferably, from about 5 inches to about 7 inches, for example, about 6inches.

In other embodiments, width 244 of isolator port 240 and the width ofisolator assembly 500 may independently be within a range from about 3inches to about 12 inches, preferably, from about 4 inches to about 8inches, and more preferably, from about 5 inches to about 6 inches.Also, length 242 of isolator port 240 and the length of the isolatorassembly 500 may independently be within a range from about 0.5 inchesto about 5 inches, preferably, from about 1 inch to about 4 inches, fromabout 1.5 inches to about 2 inches.

In other embodiments, width 264 of exhaust port 260 and the width ofexhaust assembly 800 may independently be within a range from about 3inches to about 12 inches, preferably, from about 4 inches to about 8inches, and more preferably, from about 5 inches to about 6 inches.Also, length 262 of exhaust port 260 and the length of the exhaustassembly 800 may independently be within a range from about 0.5 inchesto about 5 inches, preferably, from about 1 inch to about 4 inches, fromabout 1.5 inches to about 2 inches.

Reactor lid assembly 200 may be coupled to and in fluid communicationwith at least one heat exchanger as part of the heat regulation system.In some embodiments, reactor lid assembly 200 may be coupled to and influid communication with two, three, or more heat exchanger.

The heat regulation system 190 (FIG. 1F) of reactor lid assembly 200contains inlets 214 a, 216 a, and 218 a and outlets 214 b, 216 b, and218 b, as depicted in FIG. 2A. Each pair of the inlet and outlet iscoupled to and in fluid communication with a passageway extendingthroughout reactor lid assembly 200. Inlets 214 a, 216 a, and 218 a mayreceive a liquid from the heat exchanger while outlets 214 b, 216 b, and218 b send the liquid back to the heat exchanger, such as heatexchangers 180 a-180 c. In some embodiments, the temperature regulationsystem 190 utilizes heat exchangers 180 a-180 c to independentlymaintain reactor body assembly 102 and/or reactor lid assembly 200 at atemperature within a range from about 250° C. to about 350° C.,preferably, from about 275° C. to about 325° C., more preferably, fromabout 290° C. to about 310° C., such as about 300° C.

FIGS. 2B-2C illustrate fluid passageways 224, 226, and 228. Fluidpassageway 224 is disposed between inlet 214 a and outlet 214 b, whichmay be coupled to and in fluid communication to a heat exchanger. Fluidpassageway 224 is disposed between showerhead assembly 700 and exhaustassembly 800. Also, fluid passageway 226 is disposed between inlet 216 aand outlet 216 b, and fluid passageway 228 is disposed between inlet 218a and outlet 218 b, which both may independently be coupled to and influid communication to a heat exchanger. Fluid passageway 226 isdisposed between showerhead assembly 700 and isolator assembly 500, andfluid passageway 228 is disposed between showerhead assembly 700 andisolator assembly 500.

Fluid passageway 224 is partially formed between groove 213 and plate223. Similarly, fluid passageway 226 is partially formed between groove215 and plate 225, and fluid passageway 228 is partially formed betweengroove 217 and plate 227. Grooves 213, 215, and 217 may be formed withinlower surface 208 of lid support 210. FIG. 2D depicts plates 223, 225,and 227 respectively covering grooves 213, 215, and 217.

In one embodiment, a reactor lid assembly 200 for vapor deposition isprovided which includes a first showerhead assembly 700 and an isolatorassembly 500 disposed next to each other on a lid support 210, and asecond showerhead assembly 700 and an exhaust assembly 800 disposed nextto each other on the lid support 210, wherein the isolator assembly 500is disposed between the first and second showerhead assemblies 700 andthe second showerhead assembly 700 is disposed between the isolatorassembly 500 and the exhaust assembly 800.

In another embodiment, a reactor lid assembly 200 for vapor depositionis provided which includes a chamber station 160 having a firstshowerhead assembly 700 and an isolator assembly 500 disposed next toeach other on a lid support 210, and a chamber station 162 having asecond showerhead assembly 700 and an exhaust assembly 800 disposed nextto each other on the lid support 210, wherein the isolator assembly 500is disposed between the first and second showerhead assemblies 700 andthe second showerhead assembly 700 is disposed between the isolatorassembly 500 and the exhaust assembly 800.

In another embodiment, a reactor lid assembly 200 for vapor depositionis provided which includes a first showerhead assembly 700, an isolatorassembly 500, a second showerhead assembly 700, and an exhaust assembly800 consecutively and linearly disposed next to each other on a lidsupport 210, wherein the isolator assembly 500 is disposed between thefirst and second showerhead assemblies 700 and the second showerheadassembly 700 is disposed between the isolator assembly 500 and theexhaust assembly 800.

In another embodiment, a reactor lid assembly 200 for vapor depositionis provided which includes a first showerhead assembly 700, an isolatorassembly 500, a second showerhead assembly 700, and an exhaust assembly800 consecutively and linearly disposed next to each other on a lidsupport 210, and a temperature regulation system 190 having at least oneliquid or fluid passageway, but often may have two, three, or moreliquid or fluid passageways, such as fluid passageways 224, 226, and228, extending throughout the lid support 210. The temperatureregulation system 190 further has at least one inlet, such as inlets 214a, 216 a, and 218 a, and at least one outlet, such as outlets 214 b, 216b, and 218 b, coupled to and in fluid communication with the fluidpassageways 224, 226, and 228. Each of the inlets 214 a, 216 a, and 218a and outlets 214 b, 216 b, and 218 b may be independently coupled toand in fluid communication with a liquid reservoir, a heat exchanger, ormultiple heat exchangers, such as heat exchangers 180 a, 180 b, and 180c. In one example, the liquid reservoir may contain or be a source ofwater, alcohols, glycols, glycol ethers, organic solvents, or mixturesthereof.

In one example, the first showerhead assembly 700 may be disposedbetween the two independent fluid passageways of the temperatureregulation system 190 which extend through the reactor lid assembly 200.In another example, the second showerhead assembly 700 may be disposedbetween the two independent fluid passageways of the temperatureregulation system 190 which extend through the reactor lid assembly 200.In another example, the isolator assembly 500 may be disposed betweenthe two independent fluid passageways of the temperature regulationsystem 190 which extend through the reactor lid assembly 200. In anotherexample, the exhaust assembly 800 may be disposed between the twoindependent fluid passageways of the temperature regulation system 190which extend through the reactor lid assembly 200.

In another embodiment, a reactor lid assembly 200 for vapor depositionis provided which includes a chamber station 160 having a firstshowerhead assembly 700 and an isolator assembly 500 disposed next toeach other on a lid support 210, a chamber station 162 having a secondshowerhead assembly 700 and an exhaust assembly 800 disposed next toeach other on the lid support 210, wherein the isolator assembly 500 isdisposed between the first and second showerhead assemblies 700, and thetemperature regulation system 190.

In one embodiment, the first showerhead assembly 700, the isolatorassembly 500, the second showerhead assembly 700, and the exhaustassembly 800 are consecutively disposed next to each and along thelength of lid support 210. In some embodiments, the isolator assembly500 may have a longer width than the first or second showerhead assembly700. In other embodiments, the isolator assembly 500 may have a shorterlength than the first or second showerhead assembly 700. In someembodiments, the exhaust assembly 800 may have a longer width than thefirst or second showerhead assembly 700. In other embodiments, theexhaust assembly 800 may have a shorter length than the first or secondshowerhead assembly 700.

In some examples, the first showerhead assembly 700, the isolatorassembly 500, the second showerhead assembly 700, and the exhaustassembly 800 independently have a rectangular geometry. In otherexamples, the first showerhead assembly 700 and the second showerheadassembly 700 have a square geometry. The lid support 210 may contain orbe made from a material such as steel, stainless steel, 300 seriesstainless steel, iron, nickel, chromium, molybdenum, aluminum, alloysthereof, or combinations thereof.

Embodiments provide that each of the isolator assembly 500 or the firstor second showerhead assemblies 700 independently has a body 502 or 702containing upper portion 506 or 706 disposed on a lower portion 504 or704, a centralized channel 516 or 716 extending through the upperportion 506 or 706 and the lower portion 504 or 704, between innersurfaces 509 or 709 of the body 502 or 702, and parallel to a centralaxis 501 or 701 extending through the body 502 or 702 and an optionaldiffusion plate 530 or 730 having a first plurality of holes 532 or 732and disposed within the centralized channel 516 or 716. The isolatorassembly 500 or the first or second showerhead assemblies 700independently have an upper tube plate 540 or 740 having a secondplurality of holes 542 or 742 and disposed within the centralizedchannel 516 or 716 and optionally below the diffusion plate 530 or 730and a lower tube plate 550 or 750 having a third plurality of holes 552or 752 and disposed within the centralized channel 516 or 716 below theupper tube plate 540 or 740. Either of the showerhead assemblies 700 orthe isolator assembly 500 independently may further have a plurality ofgas tubes 580 or 780 extending from the upper tube plate 540 or 740 tothe lower tube plate 550 or 750, wherein each of the gas tubes 580 or780 is coupled to and in fluid communication with an individual holefrom the second plurality of holes 542 or 742 and an individual holefrom the third plurality of holes 552 or 752.

In another embodiment, an exhaust assembly 800 contains a body 802having an upper portion 806 disposed on a lower portion 804, acentralized channel 816 extending through the upper portion 806 and thelower portion 804, between inner surfaces 809 of the body 802, andparallel to a central axis 801 extending through the body 802, anexhaust outlet 860 disposed on the upper portion 806 of the body 802, anoptional diffusion plate 830 having a first plurality of holes 832 anddisposed within the centralized channel 816, an upper tube plate 840having a second plurality of holes 842 and disposed within thecentralized channel 816 and optionally below the diffusion plate 830 (ifpresent), a lower tube plate 850 having a third plurality of holes 852and disposed within the centralized channel 816 below the upper tubeplate 840. The exhaust assembly 800 may further contain a plurality ofexhaust tubes 880 extending from the upper tube plate 840 to the lowertube plate 850, wherein each of the exhaust tubes 880 is coupled to andin fluid communication with an individual hole from the second pluralityof holes 842 and an individual hole from the third plurality of holes852.

FIGS. 4A-4E depict wafer carrier track 400 according to one embodimentdescribed herein. In another embodiment, wafer carrier track 400 forlevitating and traversing a substrate susceptor, such as levitatingwafer carrier 480 within a vapor deposition reactor system, such asreactor 100, is provided which includes an upper segment 410 of wafercarrier track 400 disposed over a lower segment 412 of wafer carriertrack 400. Gas cavity 430 is formed between upper segment 410 and lowersegment 412 of wafer carrier track 400. Two side surfaces 416 extendalong upper segment 410 of wafer carrier track 400 and parallel to eachother. Guide path 420 extends between the two side surfaces 416 andalong upper surface 418 of upper segment 410. A plurality of gas holes438 is disposed within guide path 420 and extend from upper surface 418of upper segment 410, through upper segment 410, and into gas cavity430.

In another embodiment, upper lap joint 440 is disposed at one end ofwafer carrier track 400 and lower lap joint 450 is disposed at theopposite end of wafer carrier track 400, wherein upper lap joint 440extends along a portion of guide path 420 and side surfaces 416. Upperlap joint 440 has lower surface 442 extending further than lower segment412. Lower lap joint 450 has upper surface 452 extending further thanguide path 420 and side surfaces 416 of wafer carrier track 400.

Generally, upper segment 410 and/or lower segment 412 of wafer carriertrack 400 may independently contain quartz. In some examples, lowersegment 412 of wafer carrier track 400 may be a quartz plate. Uppersegment 410 and lower segment 412 of wafer carrier track 400 may befused together. In one specific example, upper segment 410 and lowersegment 412 both contain quartz and are fused together forming gascavity therebetween. The quartz contained in upper segment 410 and/orlower segment 412 of wafer carrier track 400 is usually transparent, butin some embodiments, portions of wafer carrier track 400 may containquartz that is opaque.

In another embodiment, gas port 434 extends from side surface 402 ofwafer carrier track 400 and into gas cavity 430. In one example, gasport 434 extends through upper segment 410. The plurality of gas holes438 may number from about 10 holes to about 50 holes, preferably, fromabout 20 holes to about 40 holes. Each of the gas holes 438 may have adiameter within a range from about 0.005 inches to about 0.05 inches,preferably, from about 0.01 inches to about 0.03 inches.

In other embodiments, a wafer carrier track system may contain two ormore wafer carrier tracks 400 disposed end to end in series, as depictedin FIGS. 4D-4E. In one embodiment, the wafer carrier track system isprovided which includes an upper lap joint 440 of a first wafer carriertrack 400 disposed over a lower lap joint 450 of a second wafer carriertrack 400, an exhaust port formed between the upper lap joint 440 of thefirst wafer carrier track 400 and the lower lap joint 450 of the secondwafer carrier track 400, and a first guide path on an upper surface ofthe first wafer carrier track 400 aligned with a second guide path on anupper surface of the second wafer carrier track 400. In some examples,an upper lap joint 440 of the second wafer carrier track 400 may bedisposed over a lower lap joint 450 of a third wafer carrier track 400(not shown).

In another embodiment, wafer carrier track 400 for levitating andtraversing levitating wafer carrier 480 within a vapor depositionreactor system, such as reactor 100, is provided which includes wafercarrier track 400 having gas cavity 430 formed within, guide path 420extending along an upper surface of wafer carrier track 400, a pluralityof gas holes 438 within guide path 420 and extending from the uppersurface of wafer carrier track 400 and into gas cavity 430, and an upperlap joint 440 disposed at one end of wafer carrier track 400 and a lowerlap joint 450 disposed at the opposite end of wafer carrier track 400,wherein the upper lap joint 440 extends a portion of guide path 420 andthe lower lap joint 450 has an upper surface extending further thanguide path 420 of wafer carrier track 400.

At least one side surface may be disposed on wafer carrier track 400 andextends along and above guide path 420. In some examples, two sidesurfaces 416 are disposed on wafer carrier track 400 and extend alongand above guide path 420. Guide path 420 may extend between the two sidesurfaces 416. In one embodiment, an upper segment 410 of wafer carriertrack 400 may be disposed over a lower segment 412 of wafer carriertrack 400. Upper segment 410 of wafer carrier track 400 may have guidepath 420 extending along the upper surface. Gas cavity 430 may be formedbetween upper segment 410 and lower segment 412 of wafer carrier track400. In some examples, upper segment 410 and lower segment 412 of wafercarrier track 400 may be fused together. In some embodiments, wafercarrier track 400 contains quartz. Upper segment 410 and lower segment412 of wafer carrier track 400 may independently contain quartz. In oneexample, lower segment 412 of wafer carrier track 400 is a quartz plate.

In other embodiments, gas port 434 extends from a side surface of wafercarrier track 400 and into gas cavity 430. Gas port 434 may be utilizedto flow the levitating gas through the side surface of wafer carriertrack 400, into gas cavity 430 and out from the plurality of gas holes438 on the upper surface of wafer carrier track 400. The plurality ofgas holes 438 may number from about 10 holes to about 50 holes,preferably, from about 20 holes to about 40 holes. Each gas hole 438 mayhave a diameter within a range from about 0.005 inches to about 0.05inches, preferably, from about 0.01 inches to about 0.03 inches.

In another embodiment, FIGS. 12A-12E depict levitating wafer carrier 480which may be used to carry a substrate through a variety of processingchambers including the CVD reactors as described herein, as well asother processing chambers used for deposition or etching. Levitatingwafer carrier 480 has short sides 471, long sides 473, an upper surface472, and a lower surface 474. Levitating wafer carrier 480 isillustrated with a rectangular geometry, but may also have a squaregeometry, a circular geometry, or other geometries. Levitating wafercarrier 480 may contain or be formed from graphite or other materials.Levitating wafer carrier 480 usually travels through the CVD reactorwith the short sides 471 facing forward while the long sides 473 facetowards the sides of the CVD reactor.

FIGS. 12A-12B depict levitating wafer carrier 480 according to oneembodiment described herein. FIG. 12A illustrates a top view oflevitating wafer carrier 480 containing 3 indentations 475 on the uppersurface 472. Wafers or substrates may be positioned within theindentations 475 while being transferred through the CVD reactor duringa process. Although illustrated with 3 indentations 475, the uppersurface 472 may have more or less indentations, including noindentations. For example, the upper surface 472 of levitating wafercarrier 480 may contain 0, 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 12, or moreindentations for containing wafers or substrates. In some example, onewafer/substrate or multiple wafers/substrates may be disposed directlyon the upper surface 472 which does not have an indentation.

FIG. 12B illustrates a bottom view of levitating wafer carrier 480containing the indentation 478 on the lower surface 474, as described inone embodiment herein. The indentation 478 may be used to help levitatelevitating wafer carrier 480 upon the introduction of a gas cushionunder levitating wafer carrier 480. A gas flow may be directed at theindentation 478, which accumulates gas to form the gas cushion. Thelower surface 474 of levitating wafer carrier 480 may have noindentations, or may have one indentation 478 (FIG. 12B), twoindentations 478 (FIGS. 12C-12E), three indentations 478 (not shown) ormore. Each of the indentations 478 may have straight or tapered sides.In one example, each indentation 478 has tapered sides such that thesides 476 are steeper or more abrupt than the sides 477 which have moreof a gradual change of angle. The sides 477 within the indentation 478may be tapered to compensate for a thermal gradient across levitatingwafer carrier 480. Also, the sides 477 may be tapered or angled to helpform a gas pocket and to maintain the gas pocket under levitating wafercarrier 480 while lifting and moving/traversing levitating wafer carrier480 along wafer carrier track 400. In another example, the indentation478 has straight or substantially straight sides and tapered sides suchthat the sides 476 are straight or substantially straight and the sides477 have a taper/angle or the sides 477 are straight or substantiallystraight and the sides 476 have a taper/angle. Alternatively, theindentation 478 may have all straight sides such that the sides 476 and477 are straight or substantially straight.

In another embodiment, FIGS. 12C-12E illustrate bottom views oflevitating wafer carrier 480 containing two indentations 478 on thelower surface 474. The two indentations 478 help levitate levitatingwafer carrier 480 upon the introduction of a gas cushion underlevitating wafer carrier 480. A gas flow may be directed at theindentations 478, which accumulates gas to form the gas cushion. Theindentations 478 may have straight or tapered sides. In one example, asillustrated in FIG. 10E, the indentations 478 have all straight sidessuch that the sides 476 and 477 are straight, e.g., perpendicular to theplane of the lower surface 474. In another example, as illustrated inFIG. 10F, the indentations 478 have all tapered sides such that thesides 476 are steeper or more abrupt than the sides 477 which have moreof a gradual change of angle. The sides 477 within the indentations 478may be tapered to compensate for a thermal gradient across levitatingwafer carrier 480. Alternatively, the indentations 478 may have acombination of straight sides and tapered sides such that the sides 476are straight and the sides 477 have a taper or the sides 477 arestraight and the sides 476 have a taper.

Levitating wafer carrier 480 contains a heat flux which extends from thelower surface 474 to the upper surface 472 and to any substratesdisposed thereon. The heat flux may be controlled by both the internalpressure and length of the processing system. The profile of levitatingwafer carrier 480 may be tapered to compensate the heat loses from othersources. During a process, heat is lost through the edges of levitatingwafer carrier 480, such as the short sides 471 and the long sides 473.However, the heat lost may be compensated by allowing more heat fluxinto the edges of levitating wafer carrier 480 by reducing the gap ofthe channel in the levitation.

In another embodiment, wafer carrier track 400 contains levitating wafercarrier 480 disposed on guide path 420. In some examples, levitatingwafer carrier 480 has at least one indentation pocket disposed within alower surface. In other examples, levitating wafer carrier 480 has atleast two indentation pockets disposed within a lower surface.

FIGS. 5A-5D depict isolator assembly 500 for a vapor deposition chamber,such as reactor 100, according embodiments described herein. In oneembodiment, isolator assembly 500 includes body 502 having upper portion506 and lower portion 504, and centralized channel 516 extending throughupper portion 506 and lower portion 504 of body 502. Upper portion 506contains upper surface 507. Centralized channel 516 extends betweeninner surfaces 509 of body 502, and parallel to central axis 501extending through body 502. Diffusion plate 530 contains a plurality ofgas holes 532 and is disposed within centralized channel 516. In oneexample, diffusion plate 530 is disposed on a flange or ledge 510. Inanother example, isolator assembly 500 does not contain diffusion plate530 disposed therein.

Isolator assembly 500 further contains upper tube plate 540 having aplurality of gas holes 542 and disposed within centralized channel 516below diffusion plate 530. Isolator assembly 500 also contains lowertube plate 550 having a plurality of gas holes 552 and disposed withincentralized channel 516 below upper tube plate 540. A plurality of gastubes 580 extend from upper tube plate 540 to lower tube plate 550,wherein each tube is coupled to and in fluid communication with anindividual hole from the plurality of gas holes 542 and an individualhole from plurality of gas holes 552. Each of the gas tubes 580 extendsparallel or substantially parallel to each other as well as to centralaxis 501 in many embodiments described herein. In an alternativeembodiment, not shown, each of the gas tubes 580 may extend at apredetermined angle relative to central axis 501, such as within a rangefrom about 1° to about 15° or greater.

Isolator assembly 500 may be used to disperse gases, such as purgegases, precursor gases, and/or carrier gases, by providing a flow paththrough inlet port 522 and into cavities 538, 548, and 558. Cavity 538is formed between upper plate 520 and diffusion plate 530 withincentralized channel 516. Cavity 548 is formed between diffusion plate530 and upper tube plate 540 within centralized channel 516. Cavity 558is formed between upper tube plate 540 and lower tube plate 550 withincentralized channel 516.

In another embodiment, isolator assembly 500 includes body 502containing upper portion 506 and lower portion 504, wherein upperportion 506 contains a flange extending over lower portion 504,centralized channel 516 extending through upper portion 506 and lowerportion 504 of body 502, between inner surfaces 509 of body 502, andparallel to central axis 501 extending through body 502, diffusion plate530 containing a plurality of gas holes 532 and disposed withincentralized channel 516, upper tube plate 540 containing a plurality ofgas holes 542 and disposed within centralized channel 516 belowdiffusion plate 530, lower tube plate 550 containing a plurality of gasholes 552 and disposed within centralized channel 516 below upper tubeplate 540, and plurality of gas tubes 580 extending from upper tubeplate 540 to lower tube plate 550, wherein each tube is coupled to andin fluid communication with an individual hole from plurality of gasholes 542 and an individual hole from plurality of gas holes 552.

In another embodiment, isolator assembly 500 includes body 502containing upper portion 506 and lower portion 504, wherein upperportion 506 adjacently extends from central axis 501 of body 502 furtherthan lower portion 504 and lower portion 504 extends parallel to centralaxis 501 further than upper portion 506, centralized channel 516extending through upper portion 506 and lower portion 504 of body 502,between inner surfaces 509 of body 502, and parallel to central axis501, diffusion plate 530 containing a plurality of gas holes 532 anddisposed within centralized channel 516, upper tube plate 540 containinga plurality of gas holes 542 and disposed within centralized channel 516below diffusion plate 530, lower tube plate 550 containing a pluralityof gas holes 552 and disposed within centralized channel 516 below uppertube plate 540, and plurality of gas tubes 580 extending from upper tubeplate 540 to lower tube plate 550, wherein each tube is coupled to andin fluid communication with an individual hole from plurality of gasholes 542 and an individual hole from plurality of gas holes 552.

In another embodiment, isolator assembly 500 includes body 502containing upper portion 506 and lower portion 504, centralized channel516 extending through upper portion 506 and lower portion 504 of body502, between inner surfaces 509 of body 502, and parallel to centralaxis 501 extending through body 502, diffusion plate 530 containing aplurality of gas holes 532 and disposed within centralized channel 516,upper tube plate 540 containing a plurality of gas holes 542 anddisposed within centralized channel 516 below diffusion plate 530, andlower tube plate 550 containing a plurality of gas holes 552 anddisposed within centralized channel 516 below upper tube plate 540.

In another embodiment, isolator assembly 500 includes body 502containing upper portion 506 and lower portion 504, centralized channel516 extending through upper portion 506 and lower portion 504 of body502, between inner surfaces 509 of body 502, and parallel to centralaxis 501 extending through body 502, upper tube plate 540 containing aplurality of gas holes 532 and disposed within centralized channel 516below diffusion plate 530, lower tube plate 550 containing a pluralityof gas holes 542 and disposed within centralized channel 516 below uppertube plate 540, and plurality of gas tubes 580 extending from upper tubeplate 540 to lower tube plate 550, wherein each tube is coupled to andin fluid communication with an individual hole from plurality of gasholes 532 and an individual hole from plurality of gas holes 542.

In some embodiments, isolator assembly 500 is a modular showerheadassembly. Upper portion 506 and lower portion 504 of body 502 mayindependently contain a material such as steel, stainless steel, 300series stainless steel, iron, nickel, chromium, molybdenum, aluminum,alloys thereof, or combinations thereof. In one example, upper portion506 and lower portion 504 of body 502 each independently containsstainless steel or alloys thereof.

In one embodiment, isolator assembly 500 contains gaseous inlet 560disposed on upper portion 506 of body 502. Upper plate 520 may bedisposed on an upper surface of upper portion 506 of body 502 andgaseous inlet 560 may be disposed on the plate. The plate may contain amaterial such as steel, stainless steel, 300 series stainless steel,iron, nickel, chromium, molybdenum, aluminum, alloys thereof, orcombinations thereof. In some examples, the plate has inlet port 522extending therethrough. Gaseous inlet 560 has inlet tube 564 extendingthrough inlet port 522. Inlet nozzle 562 may be coupled to one end ofinlet tube 564 and disposed above the plate. In another example, theupper surface of upper portion 506 of the showerhead body has groove 508which encompasses centralized channel 516. An O-ring may be disposedwithin groove 508. Diffusion plate 530 may be disposed on a ledge or aflange protruding from side surfaces of body 502 within centralizedchannel 516.

In one embodiment, plurality of gas tubes 580 may have tubes numberingwithin a range from about 500 tubes to about 1,500 tubes, preferably,from about 700 tubes to about 1,200 tubes, and more preferably, fromabout 800 tubes to about 1,000 tubes, for example, about 900 tubes. Insome examples, each tube may have a length within a range from about 0.5cm to about 2 cm, preferably, from about 0.8 cm to about 1.2 cm, forexample, about 1 cm. In other examples, each tube may have a diameterwithin a range from about 0.005 inches to about 0.05 inches, preferably,from about 0.01 inches to about 0.03 inches. In some examples, the tubesare hypodermic needles. The tubes may contain or be made from a materialsuch as steel, stainless steel, 300 series stainless steel, iron,nickel, chromium, molybdenum, aluminum, alloys thereof, or combinationsthereof.

In one embodiment, each hole of plurality of gas holes 532 on diffusionplate 530 has a larger diameter than each hole of plurality of gas holes542 on upper tube plate 540. Further, each hole of plurality of gasholes 532 on diffusion plate 530 has a larger diameter than each hole ofplurality of gas holes 552 on the lower diffusion plate. Also, each holeof plurality of gas holes 542 on upper tube plate 540 has the samediameter or substantially the same diameter as each hole of plurality ofgas holes 552 on lower tube plate 550.

In one embodiment, diffusion plate 530 may contain or be made from amaterial such as steel, stainless steel, 300 series stainless steel,iron, nickel, chromium, molybdenum, aluminum, alloys thereof, orcombinations thereof. Diffusion plate 530 may contain holes numberingwithin a range from about 20 holes to about 200 holes, preferably, fromabout 25 holes to about 55 holes, and more preferably, from about 40holes to about 60 holes. Each hole of diffusion plate 530 may have adiameter within a range from about 0.005 inches to about 0.05 inches,preferably, from about 0.01 inches to about 0.03 inches. In anotherembodiment, upper tube plate 540 and/or lower tube plate 550 mayindependently contain or be independently made from a material such assteel, stainless steel, 300 series stainless steel, iron, nickel,chromium, molybdenum, aluminum, alloys thereof, or combinations thereof.Upper tube plate 540 and/or lower tube plate 550 may independently havefrom about 500 holes to about 1,500 holes, preferably, from about 700holes to about 1,200 holes, and more preferably, from about 800 holes toabout 1,000 holes. Each hole of upper tube plate 540 and/or lower tubeplate 550 may independently have a diameter within a range from about0.005 inches to about 0.05 inches, preferably, from about 0.01 inches toabout 0.03 inches. In another embodiment, isolator assembly 500 may havea gaseous hole density and/or number of tubes within a range from about10 holes/in² (holes per square inch) to about 60 holes/in², preferably,from about 15 holes/in² to about 45 holes/in², and more preferably, fromabout 20 holes/in² to about 36 holes/in².

In one example, the upper surface of upper portion 506 of body 502 ofisolator assembly 500 is a metallic plate. In other examples, isolatorassembly 500 may have a rectangular geometry or a square geometry. Inanother embodiment, body 502 of isolator assembly 500 further contains atemperature regulation system. The temperature regulation system, suchas temperature regulation system 190, may contain fluid passageway 518extending within body 502, and may have inlet 514 a and outlet 514 bcoupled to and in fluid communication with fluid passageway 518. Inlet514 a and outlet 514 b may be independently coupled to and in fluidcommunication with a liquid reservoir or at least one heat exchanger,such as heat exchangers 180 a, 180 b, or 180 c within temperatureregulation system 190, as depicted in FIG. 1F.

FIG. 6 depicts heating lamp assembly 600, which may be utilized to heatwafers or substrates, as well as wafer carriers or substrate supportswithin a vapor deposition reactor system, as described in embodimentsherein. In one embodiment, heating lamp assembly 600 is provided whichincludes lamp housing 610 disposed on upper surface 606 of support base602 and containing first lamp holder 620 a and second lamp holder 620 b,a plurality of lamps 624 extending from first lamp holder 620 a tosecond lamp holder 620 b, wherein each lamp 624 has a split filament ora non-split filament, and reflector 650 disposed on upper surface 606 ofsupport base 602 is disposed between first lamp holder 620 a and secondlamp holder 620 b.

In another embodiment, heating lamp assembly 600 includes lamp housing610 disposed on upper surface 606 of support base 602 and containingfirst lamp holder 620 a and second lamp holder 620 b, a first pluralityof lamps 624 extending from first lamp holder 620 a to second lampholder 620 b, wherein each lamp of the first plurality has a splitfilament, a second plurality of lamps 624 extending from first lampholder 620 a to second lamp holder 620 b, wherein each lamp of thesecond plurality has a non-split filament, and reflector 650 disposed onupper surface 606 of support base 602 between first lamp holder 620 aand second lamp holder 620 b.

In another embodiment, heating lamp assembly 600 includes lamp housing610 disposed on upper surface 606 of support base 602 and containingfirst lamp holder 620 a and second lamp holder 620 b, a first pluralityof lamps 624 extending from first lamp holder 620 a to second lampholder 620 b, wherein each lamp of the first plurality has a splitfilament, a second plurality of lamps 624 extending from first lampholder 620 a to second lamp holder 620 b, wherein each lamp of thesecond plurality has a non-split filament, and the first plurality oflamps 624 are sequentially or alternately disposed between the secondplurality of lamps 624 while extending between the first and second lampholders. Also, reflector 650 may be disposed on upper surface 606 ofsupport base 602 between first lamp holder 620 a and second lamp holder620 b.

In another embodiment, heating lamp assembly 600 includes lamp housing610 disposed on upper surface 606 of support base 602 and containingfirst lamp holder 620 a and second lamp holder 620 b, a plurality oflamps 624 extending from first lamp holder 620 a to second lamp holder620 b, wherein the plurality of lamps 624 contain a first group of lampsand a second group of lamps sequentially or alternately disposed betweeneach other, each lamp of the first group of lamps contains a splitfilament, and each lamp of the second group of lamps contains anon-split filament, and reflector 650 disposed on upper surface 606 ofsupport base 602 between first lamp holder 620 a and second lamp holder620 b.

In another embodiment, heating lamp assembly 600 includes lamp housing610 disposed on upper surface 606 of support base 602 and containingfirst lamp holder 620 a and second lamp holder 620 b, a plurality ofposts 622 disposed on first lamp holder 620 a and second lamp holder 620b, a plurality of lamps 624 extending from first lamp holder 620 a tosecond lamp holder 620 b, wherein each lamp has a split filament or anon-split filament, and reflector 650 disposed on upper surface 606 ofsupport base 602 between first lamp holder 620 a and second lamp holder620 b.

In another embodiment, heating lamp assembly 600 includes lamp housing610 disposed on upper surface 606 of support base 602 and containingfirst lamp holder 620 a and second lamp holder 620 b, a plurality ofposts 622 disposed on first lamp holder 620 a and second lamp holder 620b, a plurality of lamps 624 extending from first lamp holder 620 a tosecond lamp holder 620 b, wherein each lamp has a split filament or anon-split filament, and each lamp has a first end disposed between twoposts 622 on first lamp holder 620 a and a second end disposed betweentwo posts 622 on second lamp holder 620 b, and reflector 650 disposed onupper surface 606 of support base 602 between first lamp holder 620 aand second lamp holder 620 b.

In another embodiment, heating lamp assembly 600 includes lamp housing610 disposed on upper surface 606 of support base 602 and containingfirst lamp holder 620 a and second lamp holder 620 b, a plurality ofposts 622 disposed on first lamp holder 620 a and second lamp holder 620b, a plurality of lamps 624 extending from first lamp holder 620 a tosecond lamp holder 620 b, wherein each lamp has a first end disposedbetween two posts 622 on first lamp holder 620 a and a second enddisposed between two posts 622 on second lamp holder 620 b, andreflector 650 disposed on upper surface 606 of support base 602 betweenfirst lamp holder 620 a and second lamp holder 620 b.

In another embodiment, heating lamp assembly 600 includes lamp housing610 disposed on upper surface 606 of support base 602 and containingfirst lamp holder 620 a and second lamp holder 620 b, a plurality ofposts 622 disposed on first lamp holder 620 a and second lamp holder 620b, a plurality of lamps 624 extending from first lamp holder 620 a tosecond lamp holder 620 b, and reflector 650 disposed on upper surface606 of support base 602 between first lamp holder 620 a and second lampholder 620 b.

In another embodiment, heating lamp assembly 600 for a vapor depositionreactor system is provided which includes lamp housing 610 disposed onupper surface 606 of support base 602 and containing first lamp holder620 a and second lamp holder 620 b, a plurality of lamps 624 extendingfrom first lamp holder 620 a to second lamp holder 620 b, and reflector650 disposed on upper surface 606 of support base 602 between first lampholder 620 a and second lamp holder 620 b.

In one embodiment, heating lamp assembly 600 contains reflector 650and/or the upper surface of reflector 650 contains a reflective metal,such as gold, silver, copper, aluminum, nickel, chromium, alloysthereof, or combinations thereof. In many examples, reflector 650 and/orthe upper surface of reflector 650 contains gold or a gold alloy. Thelower surface of wafer carrier track 400 may be exposed to radiationemitted from lamps 624 within heating lamp assembly 600 and reflectedfrom reflector 650, the upper surface of reflector 650, and/or eachmirror 652. The emitted radiation is absorbed by wafer carrier track400, levitating wafer carrier 460, and wafers 90 within reactor 100. Insome embodiments of processes described herein, wafer carrier track 400,levitating wafer carrier 460, and/or wafers 90 may each be independentlyheated by the emitted radiation to a temperature within a range fromabout 250° C. to about 350° C., preferably, from about 275° C. to about325° C., preferably, from about 290° C. to about 310° C., such as about300° C.

Heating lamp assembly 600 may contain at least one mirror 652 whichextends along upper surface 606 of support base 602 and may beperpendicular or substantially perpendicular to upper surface 606 ofsupport base 602. In some examples, mirror 652 may be the inner sidesurfaces of each lamp holder 620 a or 620 b having a reflective coatingdeposited or otherwise disposed thereon. In other examples, mirror 652may be a prefabricated or modular mirror or reflective material which isattached or adhered to the inner side surfaces of each lamp holder 620 aor 620 b. The at least one mirror 652 is generally positioned to facetowards reflector 650 at an angle of about 90° relative to the plane ofsurface 606. Preferably, in another embodiment described herein, heatinglamp assembly 600 contains two mirrors 652 extending along upper surface606 of support base 602. Both mirrors may be perpendicular orsubstantially perpendicular to upper surface 606 of support base 602 andboth mirrors 652 may face towards each other with reflector 650therebetween. Each of the two mirrors 652 faces towards reflector 650 atan angle of about 90° relative to the plane of surface 606. Each mirrorand/or the upper surface of each mirror 652 contains a reflective metal,such as gold, silver, copper, aluminum, nickel, chromium, alloysthereof, or combinations thereof. In many examples, each mirror 652and/or the upper surface of each mirror 652 contains gold or a goldalloy.

In alternative embodiments, not shown, each mirror 652 may be positionedto slightly face away from reflector 650 at an angle of greater than 90°relative to the plane of surface 606, such at an angle within a rangefrom greater than 90° to about 135°. Mirror 652 positioned at an angleof greater than 90° may be utilized to direct energy towards wafercarrier track 400, levitating wafer carrier 460, or other parts orsurfaces within reactor 100. In alternative embodiments, heating lampassembly 600 may contain three or more mirrors 652 along upper surface606 of support base 602.

The plurality of lamps 624 within heating lamp assembly 600 may numberfrom about 10 lamps to about 100 lamps, preferably, from about 20 lampsto about 50 lamps, and more preferably, from about 30 lamps to about 40lamps. In one example, heating lamp assembly 600 contains about 34lamps. Embodiments provide that each lamp may be in electrical contactwith a power source, an independent switch, and a controller. Thecontroller may be used to independently control power to each lamp.

In other embodiments, support base 602 and each lamp holder 620 a or 620b within heating lamp assembly 600 may independently contain or be madefrom a material such as steel, stainless steel, 300 series stainlesssteel, iron, nickel, chromium, molybdenum, aluminum, alloys thereof, orcombinations thereof. In some examples, first lamp holder 620 a orsecond lamp holder 620 b may independently contain or be made fromstainless steel or alloys thereof. First lamp holder 620 a or secondlamp holder 620 b independently may have a cooling coefficient within arange from about 2,000 W/m²-K to about 3,000 W/m²-K, preferably, fromabout 2,300 W/m²-K to about 2,700 W/m²-K. In one example, the coolingcoefficient is about 2,500 W/m²-K. In other embodiments, first lampholder 620 a and second lamp holder 620 b each have a thickness within arange from about 0.001 inches to about 0.1 inches.

FIG. 10A depicts a non-split filament lamp 670 and FIG. 10B depicts asplit filament lamp 680 according to multiple embodiments describedherein. Non-split filament lamp 670 contains bulb 672 and non-splitfilament 674, while split filament lamp 680 contains bulb 682 andnon-split filament 684. The plurality of lamps 624, as describedthroughout embodiments herein, generally contain non-split filamentlamps 670, split filament lamps 680, or mixtures of non-split filamentlamps 670 and split filament lamps 680.

FIGS. 11A-11F depict different pluralities of lamps which may be lamps624 and utilized to adjust a heat profile on a wafer carrier track, suchas wafer carrier track 400, a wafer carrier or substrate support, suchas levitating wafer carrier 480, and/or a wafer or a substrate, such aswafers 90, within a vapor deposition reactor, such as reactor 100, asdescribed in embodiments herein. In one embodiment, FIG. 11A illustratesa plurality of lamps containing all non-split filament lamps 670 andFIG. 11B illustrates a plurality of lamps containing all split filamentlamps 680. In another embodiment, FIG. 11C illustrates a plurality oflamps sequentially or alternatively containing non-split filament lamps670 and split filament lamps 680. In other embodiments, FIG. 11Dillustrates a plurality of lamps containing a split filament lamp 680between every two non-split filament lamps 670, while FIG. 11Eillustrates a plurality of lamps containing a non-split filament lamp670 between every two split filament lamps 680. FIG. 11F illustrates aplurality of lamps sequentially or alternatively containing non-splitfilament lamps 670 and split filament lamps 680, however, each lamp isspaced further apart from each other than the lamps in FIGS. 11A-11E.

In other embodiments, a method for heating a substrate or a substratesusceptor, such as levitating wafer carrier 480, within a vapordeposition reactor system, such as reactor 100, by heating lamp assembly600 is provided which includes exposing a lower surface of a substratesusceptor to energy emitted from heating lamp assembly 600, and heatingthe substrate susceptor to a predetermined temperature, wherein heatinglamp assembly 600 contains lamp housing 610 disposed on upper surface606 of support base 602 and containing at least one lamp holder 620 a or620 b, a plurality of lamps 624 extending from at least one of the lampholders, and reflector 650 disposed on upper surface 606 of support base602, next to the lamp holder, and below the lamps.

Embodiments of the method further provide that heating lamp assembly 600contains lamps which have split filament lamp 680, a non-split filament,or a mixture of lamps which contain either split or non-split filaments.In one embodiment, each of the lamps has split filament lamp 680. Splitfilament lamp 680 may have a center between a first end and a secondend. The first and second ends of split filament lamps 680 may bemaintained warmer than the centers of split filament lamps 680.Therefore, outer edges of the substrate susceptor may be maintainedwarmer than a center point of the substrate susceptor.

In another embodiment, each of the lamps has non-split filament lamp670. Non-split filament lamp 670 may have a center between a first endand a second end. The centers of non-split filament lamps 670 may bemaintained warmer than the first and second ends of non-split filamentlamps 670. Therefore, a center point of the substrate susceptor may bemaintained warmer than the outer edges of the substrate susceptor.

In another embodiment, the plurality of lamps 624 have split filamentlamps and non-split filament lamps. In one embodiment, split filamentlamps 680 and non-split filament lamps 670 are sequentially disposedbetween each other. Each lamp may independently be in electric contactto a power source and a controller. The method further includesindependently adjusting the amount of electricity flowing to each lamp.In one example, split filament lamp 680 may have a center between afirst end and a second end. The first and second ends of split filamentlamps 680 may be maintained warmer than the centers of split filamentlamps 680. Therefore, the outer edges of the substrate susceptor may bemaintained warmer than a center point of the substrate susceptor. Inanother example, non-split filament lamp 670 may have a center between afirst end and a second end. The centers of non-split filament lamps 670may be maintained warmer than the first and second ends of non-splitfilament lamps 670. Therefore, the center point of the substratesusceptor may be maintained warmer than the outer edges of the substratesusceptor.

In various embodiments, the method provides that the substrate susceptormay be a substrate carrier or a wafer carrier. Lamp housing 610 may havefirst lamp holder 620 a and second lamp holder 620 b. First lamp holder620 a and second lamp holder 620 b may be parallel or substantiallyparallel to each other. In one example, reflector 650 may be disposedbetween first lamp holder 620 a and second lamp holder 620 b. First lampholder 620 a and second lamp holder 620 b each have a thickness within arange from about 0.001 inches to about 0.1 inches. The predeterminedthickness of the lamp holders helps maintain a constant temperature ofthe lamp holders. Therefore, first lamp holder 620 a and second lampholder 620 b may each independently be maintained at a temperaturewithin a range from about 275° C. to about 375° C., preferably, fromabout 300° C. to about 350° C.

FIGS. 7A-7D depict showerhead assembly 700 for a vapor depositionchamber, such as reactor 100, according embodiments described herein. Inone embodiment, showerhead assembly 700 includes body 702 having upperportion 706 and lower portion 704, and centralized channel 716 extendingthrough upper portion 706 and lower portion 704 of body 702. Upperportion 706 contains upper surface 707. Centralized channel 716 extendsbetween inner surfaces 709 of body 702, and parallel to central axis 701extending through body 702. Diffusion plate 730 contains a plurality ofgas holes 732 and is disposed within centralized channel 716. In oneexample, diffusion plate 730 is disposed on a flange or ledge 710. Inanother example, showerhead assembly 700 does not contain optionaldiffusion plate 730 disposed therein.

Showerhead assembly 700 further contains upper tube plate 740 having aplurality of gas holes 742 and disposed within centralized channel 716below diffusion plate 730. Showerhead assembly 700 also contains lowertube plate 750 having a plurality of gas holes 752 and disposed withincentralized channel 716 below upper tube plate 740. A plurality of gastubes 780 extend from upper tube plate 740 to lower tube plate 750,wherein each tube is coupled to and in fluid communication with anindividual hole from the plurality of gas holes 742 and an individualhole from plurality of gas holes 752. Each of the gas tubes 780 extendsparallel or substantially parallel to each other as well as to centralaxis 701 in many embodiments described herein. In an alternativeembodiment, not shown, each of the gas tubes 780 may extend at apredetermined angle relative to central axis 701, such as within a rangefrom about 1° to about 15° or greater.

Showerhead assembly 700 may be used to disperse gases, such as purgegases, precursor gases, and/or carrier gases, by providing a flow paththrough inlet port 722 and into cavities 738, 748, and 758. Cavity 738is formed between upper plate 720 and diffusion plate 730 withincentralized channel 716. Cavity 748 is formed between diffusion plate730 and upper tube plate 740 within centralized channel 716. Cavity 758is formed between upper tube plate 740 and lower tube plate 750 withincentralized channel 716.

In another embodiment, showerhead assembly 700 includes body 702containing upper portion 706 and lower portion 704, wherein upperportion 706 contains a flange extending over lower portion 704,centralized channel 716 extending through upper portion 706 and lowerportion 704 of body 702, between inner surfaces 709 of body 702, andparallel to central axis 701 extending through body 702, diffusion plate730 containing a plurality of gas holes 732 and disposed withincentralized channel 716, upper tube plate 740 containing a plurality ofgas holes 742 and disposed within centralized channel 716 belowdiffusion plate 730, lower tube plate 750 containing a plurality of gasholes 752 and disposed within centralized channel 716 below upper tubeplate 740, and plurality of gas tubes 780 extending from upper tubeplate 740 to lower tube plate 750, wherein each tube is coupled to andin fluid communication with an individual hole from plurality of gasholes 742 and an individual hole from plurality of gas holes 752.

In another embodiment, showerhead assembly 700 includes body 702containing upper portion 706 and lower portion 704, wherein upperportion 706 adjacently extends from central axis 701 of body 702 furtherthan lower portion 704 and lower portion 704 extends parallel to centralaxis 701 further than upper portion 706, centralized channel 716extending through upper portion 706 and lower portion 704 of body 702,between inner surfaces 709 of body 702, and parallel to central axis701, diffusion plate 730 containing a plurality of gas holes 732 anddisposed within centralized channel 716, upper tube plate 740 containinga plurality of gas holes 742 and disposed within centralized channel 716below diffusion plate 730, lower tube plate 750 containing a pluralityof gas holes 752 and disposed within centralized channel 716 below uppertube plate 740, and plurality of gas tubes 780 extending from upper tubeplate 740 to lower tube plate 750, wherein each tube is coupled to andin fluid communication with an individual hole from plurality of gasholes 742 and an individual hole from plurality of gas holes 752.

In another embodiment, showerhead assembly 700 includes body 702containing upper portion 706 and lower portion 704, centralized channel716 extending through upper portion 706 and lower portion 704 of body702, between inner surfaces 709 of body 702, and parallel to centralaxis 701 extending through body 702, diffusion plate 730 containing aplurality of gas holes 732 and disposed within centralized channel 716,upper tube plate 740 containing a plurality of gas holes 742 anddisposed within centralized channel 716 below diffusion plate 730, andlower tube plate 750 containing a plurality of gas holes 752 anddisposed within centralized channel 716 below upper tube plate 740.

In another embodiment, showerhead assembly 700 includes body 702containing upper portion 706 and lower portion 704, centralized channel716 extending through upper portion 706 and lower portion 704 of body702, between inner surfaces 709 of body 702, and parallel to centralaxis 701 extending through body 702, upper tube plate 740 containing aplurality of gas holes 732 and disposed within centralized channel 716below diffusion plate 730, lower tube plate 750 containing a pluralityof gas holes 742 and disposed within centralized channel 716 below uppertube plate 740, and plurality of gas tubes 780 extending from upper tubeplate 740 to lower tube plate 750, wherein each tube is coupled to andin fluid communication with an individual hole from plurality of gasholes 732 and an individual hole from plurality of gas holes 742.

In some embodiments, showerhead assembly 700 is a modular showerheadassembly. Upper portion 706 and lower portion 704 of body 702 mayindependently contain a material such as steel, stainless steel, 300series stainless steel, iron, nickel, chromium, molybdenum, aluminum,alloys thereof, or combinations thereof. In one example, upper portion706 and lower portion 704 of body 702 each independently containsstainless steel or alloys thereof.

In one embodiment, showerhead assembly 700 contains gaseous inlet 760disposed on upper portion 706 of body 702. Upper plate 720 may bedisposed on an upper surface of upper portion 706 of body 702 andgaseous inlet 760 may be disposed on the plate. The plate may contain amaterial such as steel, stainless steel, 300 series stainless steel,iron, nickel, chromium, molybdenum, aluminum, alloys thereof, orcombinations thereof. In some examples, the plate has inlet port 722extending therethrough. Gaseous inlet 760 has inlet tube 764 extendingthrough inlet port 722. Inlet nozzle 762 may be coupled to one end ofinlet tube 764 and disposed above the plate. In another example, theupper surface of upper portion 706 of the showerhead body has groove 708which encompasses centralized channel 716. An O-ring may be disposedwithin groove 708. Diffusion plate 730 may be disposed on a ledge or aflange protruding from side surfaces of body 702 within centralizedchannel 716.

In one embodiment, plurality of gas tubes 780 may have tubes numberingwithin a range from about 500 tubes to about 1,500 tubes, preferably,from about 700 tubes to about 1,200 tubes, and more preferably, fromabout 800 tubes to about 1,000 tubes, for example, about 900 tubes. Insome examples, each tube may have a length within a range from about 0.5cm to about 2 cm, preferably, from about 0.8 cm to about 1.2 cm, forexample, about 1 cm. In other examples, each tube may have a diameterwithin a range from about 0.005 inches to about 0.05 inches, preferably,from about 0.01 inches to about 0.03 inches. In some examples, the tubesare hypodermic needles. The tubes may contain or be made from a materialsuch as steel, stainless steel, 300 series stainless steel, iron,nickel, chromium, molybdenum, aluminum, alloys thereof, or combinationsthereof.

In one embodiment, each hole of plurality of gas holes 732 on diffusionplate 730 has a larger diameter than each hole of plurality of gas holes742 on upper tube plate 740. Further, each hole of plurality of gasholes 732 on diffusion plate 730 has a larger diameter than each hole ofplurality of gas holes 752 on the lower diffusion plate. Also, each holeof plurality of gas holes 742 on upper tube plate 740 has the samediameter or substantially the same diameter as each hole of plurality ofgas holes 752 on lower tube plate 750.

In one embodiment, diffusion plate 730 may contain or be made from amaterial such as steel, stainless steel, 300 series stainless steel,iron, nickel, chromium, molybdenum, aluminum, alloys thereof, orcombinations thereof. Diffusion plate 730 may contain holes numberingwithin a range from about 20 holes to about 200 holes, preferably, fromabout 25 holes to about 75 holes, and more preferably, from about 40holes to about 60 holes. Each hole of diffusion plate 730 may have adiameter within a range from about 0.005 inches to about 0.05 inches,preferably, from about 0.01 inches to about 0.03 inches. In anotherembodiment, upper tube plate 740 and/or lower tube plate 750 mayindependently contain or be independently made from a material such assteel, stainless steel, 300 series stainless steel, iron, nickel,chromium, molybdenum, aluminum, alloys thereof, or combinations thereof.Upper tube plate 740 and/or lower tube plate 750 may independently havefrom about 500 holes to about 1,500 holes, preferably, from about 700holes to about 1,200 holes, and more preferably, from about 800 holes toabout 1,000 holes. Each hole of upper tube plate 740 and/or lower tubeplate 750 may independently have a diameter within a range from about0.005 inches to about 0.05 inches, preferably, from about 0.01 inches toabout 0.03 inches. In another embodiment, showerhead assembly 700 mayhave a gaseous hole density and/or number of tubes within a range fromabout 10 holes/in² (holes per square inch) to about 60 holes/in²,preferably, from about 15 holes/in² to about 45 holes/in², and morepreferably, from about 20 holes/in² to about 36 holes/in².

In one example, the upper surface of upper portion 706 of body 702 ofshowerhead assembly 700 is a metallic plate. In other examples,showerhead assembly 700 may have a rectangular geometry or a squaregeometry. In another embodiment, body 702 of showerhead assembly 700further contains a temperature regulation system. The temperatureregulation system, such as temperature regulation system 190, maycontain liquid or fluid passageway 718 extending within body 702, andmay have inlet 714 a and outlet 714 b coupled to and in fluidcommunication with fluid passageway 718. Inlet 714 a and outlet 714 bmay be independently coupled to and in fluid communication with a liquidreservoir or at least one heat exchanger, such as heat exchangers 180 a,180 b, or 180 c within temperature regulation system 190, as depicted inFIG. 1F.

FIGS. 8A-8D depict exhaust assembly 800 for a vapor deposition chamber,such as reactor 100, according embodiments described herein. In oneembodiment, exhaust assembly 800 includes body 802 having upper portion806 and lower portion 804, and centralized channel 816 extending throughupper portion 806 and lower portion 804 of body 802. Upper portion 806contains upper surface 807. Centralized channel 816 extends betweeninner surfaces 809 of body 802, and parallel to central axis 801extending through body 802. Diffusion plate 830 contains a plurality ofgas holes 832 and is disposed within centralized channel 816. In oneexample, diffusion plate 830 is disposed on a flange or ledge 810. Inanother example, exhaust assembly 800 does not contain optionaldiffusion plate 830 disposed therein.

Exhaust assembly 800 further contains upper tube plate 840 having aplurality of gas holes 842 and disposed within centralized channel 816below diffusion plate 830. Exhaust assembly 800 also contains lower tubeplate 850 having a plurality of gas holes 854 and disposed withincentralized channel 816 below upper tube plate 840. A plurality ofexhaust tubes 880 extend from upper tube plate 840 to lower tube plate850, wherein each tube is coupled to and in fluid communication with anindividual hole from the plurality of gas holes 842 and an individualhole from plurality of gas holes 854. Each of the exhaust tubes 880extends parallel or substantially parallel to each other as well as tocentral axis 801 in many embodiments described herein. In an alternativeembodiment, each of the exhaust tubes 880 may extend at a predeterminedangle relative to central axis 801, such as within a range from about 1°to about 15° or greater.

Exhaust assembly 800 pulls a vacuum or reduces internal pressure thoughexhaust port 822 and cavities 838, 848, and 858. Cavity 838 is formedbetween upper plate 820 and diffusion plate 830 within centralizedchannel 816. Cavity 848 is formed between diffusion plate 830 and uppertube plate 840 within centralized channel 816. Cavity 858 is formedbetween upper tube plate 840 and lower tube plate 850 within centralizedchannel 816.

In another embodiment, exhaust assembly 800 includes body 802 containingupper portion 806 and lower portion 804, wherein upper portion 806contains a flange extending over lower portion 804, centralized channel816 extending through upper portion 806 and lower portion 804 of body802, between inner surfaces 809 of body 802, and parallel to centralaxis 801 extending through body 802, diffusion plate 830 containing aplurality of gas holes 832 and disposed within centralized channel 816,upper tube plate 840 containing a plurality of gas holes 842 anddisposed within centralized channel 816 below diffusion plate 830, lowertube plate 850 containing a plurality of gas holes 854 and disposedwithin centralized channel 816 below upper tube plate 840, and pluralityof exhaust tubes 880 extending from upper tube plate 840 to lower tubeplate 850, wherein each tube is coupled to and in fluid communicationwith an individual hole from plurality of gas holes 842 and anindividual hole from plurality of gas holes 854.

In another embodiment, exhaust assembly 800 includes body 802 containingupper portion 806 and lower portion 804, wherein upper portion 806adjacently extends from central axis 801 of body 802 further than lowerportion 804 and lower portion 804 extends parallel to central axis 801further than upper portion 806, centralized channel 816 extendingthrough upper portion 806 and lower portion 804 of body 802, betweeninner surfaces 809 of body 802, and parallel to central axis 801,diffusion plate 830 containing a plurality of gas holes 832 and disposedwithin centralized channel 816, upper tube plate 840 containing aplurality of gas holes 842 and disposed within centralized channel 816below diffusion plate 830, lower tube plate 850 containing a pluralityof gas holes 854 and disposed within centralized channel 816 below uppertube plate 840, and plurality of exhaust tubes 880 extending from uppertube plate 840 to lower tube plate 850, wherein each tube is coupled toand in fluid communication with an individual hole from plurality of gasholes 842 and an individual hole from plurality of gas holes 854.

In another embodiment, exhaust assembly 800 includes body 802 containingupper portion 806 and lower portion 804, centralized channel 816extending through upper portion 806 and lower portion 804 of body 802,between inner surfaces 809 of body 802, and parallel to central axis 801extending through body 802, diffusion plate 830 containing a pluralityof gas holes 832 and disposed within centralized channel 816, upper tubeplate 840 containing a plurality of gas holes 842 and disposed withincentralized channel 816 below diffusion plate 830, and lower tube plate850 containing a plurality of gas holes 854 and disposed withincentralized channel 816 below upper tube plate 840.

In another embodiment, exhaust assembly 800 includes body 802 containingupper portion 806 and lower portion 804, centralized channel 816extending through upper portion 806 and lower portion 804 of body 802,between inner surfaces 809 of body 802, and parallel to central axis 801extending through body 802, upper tube plate 840 containing a pluralityof gas holes 832 and disposed within centralized channel 816 belowdiffusion plate 830, lower tube plate 850 containing a plurality of gasholes 842 and disposed within centralized channel 816 below upper tubeplate 840, and plurality of exhaust tubes 880 extending from upper tubeplate 840 to lower tube plate 850, wherein each tube is coupled to andin fluid communication with an individual hole from plurality of gasholes 832 and an individual hole from plurality of gas holes 842.

In some embodiments, exhaust assembly 800 is a modular showerheadassembly. Upper portion 806 and lower portion 804 of body 802 mayindependently contain a material such as steel, stainless steel, 300series stainless steel, iron, nickel, chromium, molybdenum, aluminum,alloys thereof, or combinations thereof. In one example, upper portion806 and lower portion 804 of body 802 each independently containsstainless steel or alloys thereof.

In one embodiment, exhaust assembly 800 contains exhaust outlet 860disposed on upper portion 806 of body 802. Upper plate 820 may bedisposed on an upper surface of upper portion 806 of body 802 andexhaust outlet 860 may be disposed on the plate. The plate may contain amaterial such as steel, stainless steel, 300 series stainless steel,iron, nickel, chromium, molybdenum, aluminum, alloys thereof, orcombinations thereof. In some examples, the plate has exhaust port 822extending therethrough. Exhaust outlet 860 has exhaust outlet tube 864extending through exhaust port 822. Exhaust nozzle 862 may be coupled toone end of exhaust outlet tube 864 and disposed above the plate. Inanother example, the upper surface of upper portion 806 of theshowerhead body has groove 808 which encompasses centralized channel816. An O-ring may be disposed within groove 808. Diffusion plate 830may be disposed on a ledge or a flange protruding from side surfaces ofbody 802 within centralized channel 816.

In one embodiment, plurality of exhaust tubes 880 may have tubesnumbering within a range from about 5 tubes to about 50 tubes,preferably, from about 7 tubes to about 30 tubes, and more preferably,from about 10 tubes to about 20 tubes, for example, about 14 tubes. Insome examples, each tube may have a length within a range from about 0.5cm to about 2 cm, preferably, from about 0.8 cm to about 1.2 cm, forexample, about 1 cm. In other examples, each tube may have a diameterwithin a range from about 0.1 inches to about 0.4 inches, preferably,from about 0.2 inches to about 0.3 inches, for example, about 0.23inches. In one example, exhaust assembly 800 contains a single row oftubes and holes.

In another embodiment, plurality of exhaust tubes 880 may have tubesnumbering within a range from about 500 tubes to about 1,500 tubes,preferably, from about 700 tubes to about 1,200 tubes, and morepreferably, from about 800 tubes to about 1,000 tubes, for example,about 900 tubes. In some examples, each tube may have a length within arange from about 0.5 cm to about 2 cm, preferably, from about 0.8 cm toabout 1.2 cm, for example, about 1 cm. In other examples, each tube mayhave a diameter within a range from about 0.005 inches to about 0.05inches, preferably, from about 0.01 inches to about 0.03 inches.

In some examples, the tubes are hypodermic needles. The tubes maycontain or be made from a material such as steel, stainless steel, 300series stainless steel, iron, nickel, chromium, molybdenum, aluminum,alloys thereof, or combinations thereof.

In one embodiment, each hole of plurality of gas holes 832 on diffusionplate 830 has a larger diameter than each hole of plurality of gas holes842 on upper tube plate 840. Further, each hole of plurality of gasholes 832 on diffusion plate 830 has a larger diameter than each hole ofplurality of gas holes 854 on the lower diffusion plate. Also, each holeof plurality of gas holes 842 on upper tube plate 840 has the samediameter or substantially the same diameter as each hole of plurality ofgas holes 854 on lower tube plate 850.

In one embodiment, diffusion plate 830 may contain or be made from amaterial such as steel, stainless steel, 300 series stainless steel,iron, nickel, chromium, molybdenum, aluminum, alloys thereof, orcombinations thereof. In another embodiment, diffusion plate 830 maycontain holes numbering within a range from about 5 holes to about 50holes, preferably, from about 7 holes to about 30 holes, and morepreferably, from about 10 holes to about 20 holes, for example, about 14holes. Each hole of diffusion plate 830 may have a diameter within arange from about 0.1 inches to about 0.4 inches, preferably, from about0.2 inches to about 0.3 inches, for example, about 0.23 inches. In oneexample, diffusion plate 830 contains a single row of holes. In anotherembodiment, diffusion plate 830 may contain holes numbering within arange from about 20 holes to about 200 holes, preferably, from about 25holes to about 55 holes, and more preferably, from about 40 holes toabout 60 holes. Each hole of diffusion plate 830 may have a diameterwithin a range from about 0.005 inches to about 0.05 inches, preferably,from about 0.01 inches to about 0.03 inches.

In another embodiment, upper tube plate 840 and/or lower tube plate 850may independently contain or be independently made from a material suchas steel, stainless steel, 300 series stainless steel, iron, nickel,chromium, molybdenum, aluminum, alloys thereof, or combinations thereof.In one embodiment, upper tube plate 840 and/or lower tube plate 850 mayindependently have holes numbering within a range from about 5 holes toabout 50 holes, preferably, from about 7 holes to about 30 holes, andmore preferably, from about 10 holes to about 20 holes, for example,about 14 holes. Each hole of upper tube plate 840 and/or lower tubeplate 850 may independently have a diameter within a range from about0.1 inches to about 0.4 inches, preferably, from about 0.2 inches toabout 0.3 inches, for example, about 0.23 inches. In another embodiment,exhaust assembly 800 may have a gaseous hole density and/or number oftubes within a range from about 5 holes/in² (holes per square inch) toabout 30 holes/in², preferably, from about 8 holes/in² to about 25holes/in², and more preferably, from about 10 holes/in² to about 20holes/in².

In another embodiment, upper tube plate 840 and/or lower tube plate 850may independently have from about 500 holes to about 1,500 holes,preferably, from about 700 holes to about 1,200 holes, and morepreferably, from about 800 holes to about 1,000 holes. Each hole ofupper tube plate 840 and/or lower tube plate 850 may independently havea diameter within a range from about 0.005 inches to about 0.05 inches,preferably, from about 0.01 inches to about 0.03 inches.

In one example, the upper surface of upper portion 806 of body 802 ofexhaust assembly 800 is a metallic plate. In other examples, exhaustassembly 800 may have a rectangular geometry or a square geometry. Inanother embodiment, body 802 of exhaust assembly 800 further contains atemperature regulation system. The temperature regulation system, suchas temperature regulation system 190, may contain liquid or fluidpassageway 818 extending within body 802, and may have inlet 814 a andoutlet 814 b coupled to and in fluid communication with fluid passageway818. Inlet 814 a and outlet 814 b may be independently coupled to and influid communication with a liquid reservoir or at least one heatexchanger, such as heat exchangers 180 a, 180 b, or 180 c withintemperature regulation system 190, as depicted in FIG. 1F.

In other embodiments, exhaust assembly 800, which may be utilized in avapor deposition chamber, has body 802 containing upper portion 806disposed on lower portion 804, centralized channel 816 extending throughupper portion 806 and lower portion 804 of body 802, between innersurfaces 809 of body 802, and parallel to central axis 801 extendingthrough body 802, exhaust outlet 860 disposed on upper portion 806 ofbody 802, diffusion plate 830 containing a plurality of gas holes 832and disposed within centralized channel 816, upper tube plate 840containing a plurality of gas holes 842 and disposed within centralizedchannel 816 below diffusion plate 830, lower tube plate 850 containing aplurality of gas holes 852 and disposed within centralized channel 816below upper tube plate 840, and plurality of exhaust tubes 880 extendingfrom upper tube plate 840 to lower tube plate 850, wherein each tube iscoupled to and in fluid communication with an individual hole fromplurality of gas holes 842 and an individual hole from plurality of gasholes 852.

Exhaust assembly 800 may further contain upper plate 820 disposed on anupper surface of upper portion 806 of body 802. Exhaust outlet 860 maybe disposed on upper plate 820. Upper plate 820 may contain or be madefrom a material such as steel, stainless steel, 300 series stainlesssteel, iron, nickel, chromium, molybdenum, aluminum, alloys thereof, orcombinations thereof. Upper plate 820 usually has an exhaust portextending therethrough. Exhaust outlet 860 may have exhaust outlet tube864 extending through exhaust port 822. In one example, exhaust nozzle862 may be coupled to one end of exhaust outlet tube 864 and disposedabove upper plate 820. In another example, the upper surface of upperportion 806 of the exhaust assembly body has groove 808 whichencompasses centralized channel 816. An O-ring may be disposed withingroove 808. Diffusion plate 830 may be disposed on a ledge or a flangeprotruding from side surfaces of body 802 within centralized channel816.

FIGS. 9A-9F depict reactor system 1000, a CVD system, containingmultiple reactors 1100 a, 1100 b, and 1100 c, as described byembodiments herein. Reactors 1100 a, 1100 b, and 1100 c may be the samereactors as reactor 100 or may be a modified derivative of reactor 100.In one embodiment, reactor 1100 a is coupled to reactor 1100 b, which iscoupled to reactor 1100 c, as illustrated in FIGS. 9A-9C. One end ofreactor 1100 a is coupled to end cap 1050 at interface 1012, while theother end of reactor 1100 a is coupled to one end of reactor 1100 b atinterface 1014. The other end of reactor 1100 b is coupled to one end ofreactor 1100 c at interface 1016, while the other end of reactor 1100 cis coupled to end plate 1002 at interface 1016.

FIGS. 9D-9F depicts a close-up view of portions of interface 1018between reactors 1100 b and 1100 c. In another embodiment, reactor 1100b contains wafer carrier track 1400 which has lower lap joint 1450 andreactor 1100 c contains wafer carrier track 1400 which has upper lapjoint 1440.

Exhaust purge port 1080 may be disposed between wafer carrier track 1400within reactor 1100 b and wafer carrier track 1400 within reactor 1100c. Exhaust purge port 1080 is in fluid communication with passageway1460, which extends from exhaust purge port 1080 to below wafer carriertracks 1400. Exhaust assembly 1058, similar to exhaust assembly 800, isdisposed on the reactor lid assembly of reactor 1100 b. Exhaust assembly1058 may be used to remove gases from exhaust purge port 1080. Exhaustassembly 1058 contains exhaust outlet 1060, exhaust nozzle 1062, andexhaust tube 1064.

In another embodiment, reactor system 1000 may contain additionalreactors (not shown) besides reactors 1100 a, 1100 b, and 1100 c. In oneexample, a fourth reactor is included in reactor system 1000. In anotherexample, a fifth reactor is included in reactor system 1000. Indifferent configurations and embodiments, reactor system 1000 may have1, 2, 3, 4, 5, 6, 7, 8, 9, 10, or more reactors. In other embodiments,reactors 1100 a, 1100 b, and 1100 c or other reactors which are notshown, may contain 1, 2, 3, 4, or more showerhead assemblies in eachreactor (not shown).

In alternative embodiments described herein, other configurations ofreactors 1100 a, 1100 b, and 1100 c are provided, but not illustrated inthe drawings. In one embodiment, each of the reactors 1100 a, 1100 b, or1100 c may contain three exhaust assemblies separated by two showerheadassemblies so that any of the reactor lid assemblies may sequentiallycontain a first exhaust assembly, a first showerhead assembly, a secondexhaust assembly, a second showerhead assembly, and a third exhaustassembly. In another embodiment, each of the reactors 1100 a, 1100 b, or1100 c may contain three isolator assemblies separated by two showerheadassemblies so that the reactor lid assembly sequentially contain a firstisolator assembly, a first showerhead assembly, a second isolatorassembly, a second showerhead assembly, and a third isolator assembly.

In another embodiment, each of the reactors 1100 a, 1100 b, or 1100 cmay contain two isolator assemblies and one exhaust assembly separatedby two showerhead assemblies so that any of the reactor lid assembliesmay sequentially contain a first isolator assembly, a first showerheadassembly, a second isolator assembly, a second showerhead assembly, anda first exhaust assembly. In another example, any of the reactor lidassemblies may sequentially contain a first isolator assembly, a firstshowerhead assembly, a first exhaust assembly, a second showerheadassembly, and a second isolator assembly. In another example, any of thereactor lid assemblies may sequentially contain a first exhaustassembly, a first showerhead assembly, a first isolator assembly, asecond showerhead assembly, and a second isolator assembly.

In another embodiment, each of the reactors 1100 a, 1100 b, or 1100 cmay contain two exhaust assemblies and one isolator assembly separatedby two showerhead assemblies so that any of the reactor lid assembliesmay sequentially contain a first exhaust assembly, a first showerheadassembly, a second exhaust assembly, a second showerhead assembly, and afirst isolator assembly. In another example, any of the reactor lidassemblies may sequentially contain a first exhaust assembly, a firstshowerhead assembly, a first isolator assembly, a second showerheadassembly, and a second exhaust assembly. In another example, any of thereactor lid assemblies may sequentially contain a first isolatorassembly, a first showerhead assembly, a first exhaust assembly, asecond showerhead assembly, and a second exhaust assembly.

Reactor 100, reactor system 1000, and derivatives of these reactors maybe used for a variety of CVD, MOCVD, and/or epitaxial depositionprocesses to form an assortment of materials on wafers or substrates, asdescribed in embodiments herein. In one embodiment, a Group III/Vmaterial—which contains at least one element of Group III (e.g., boron,aluminum, gallium, or indium) and at least one element of Group V (e.g.,nitrogen, phosphorous, arsenic, or antimony) may be formed or depositedon a wafer. Examples of deposited materials may contain gallium nitride,indium phosphide, gallium indium phosphide, gallium arsenide, aluminumgallium arsenide, derivatives thereof, alloys thereof, multi-layersthereof, or combinations thereof. In some embodiments herein, thedeposited materials may be epitaxial materials. The deposited materialor epitaxial material may contain one layer, but usually containsmultiple layers. In some examples, the epitaxial material contains alayer having gallium arsenide and another layer having aluminum galliumarsenide. In another example, the epitaxial material contains a galliumarsenide buffer layer, an aluminum gallium arsenide passivation layer,and a gallium arsenide active layer. The gallium arsenide buffer layermay have a thickness within a range from about 100 nm to about 500 nm,such as about 300 nm, the aluminum gallium arsenide passivation layerhas a thickness within a range from about 10 nm to about 50 nm, such asabout 30 nm, and the gallium arsenide active layer has a thicknesswithin a range from about 500 nm to about 2,000 nm, such as about 1,000nm. In some examples, the epitaxial material further contains a secondaluminum gallium arsenide passivation layer.

In one embodiment, the process gas used in reactor 100 or reactor system1000 may contain arsine, argon, helium, nitrogen, hydrogen, or mixturesthereof. In one example, the process gas contains an arsenic precursor,such as arsine. In other embodiments, the first precursor may contain analuminum precursor, a gallium precursor, an indium precursor, orcombinations thereof, and the second precursor may contain a nitrogenprecursor, a phosphorus precursor, an arsenic precursor, an antimonyprecursor or combinations thereof.

In one embodiment, the CVD reactor may be configured to supply nitrogento the reactor to float the substrate along the track of the reactor atthe entrance and the exit. A hydrogen/arsine mixture may also be used tofloat the substrate along the track of the CVD reactor between the exitand entrance. The stages along the track may include an entrancenitrogen isolation zone, a preheat exhaust, a hydrogen/arsine mixturepreheat isolation zone, a gallium arsenide deposition zone, a galliumarsenide exhaust, an aluminum gallium arsenide deposition zone, agallium arsenide N-layer deposition zone, a gallium arsenide P-layerdeposition zone, a phosphorous hydrogen arsine isolation zone, a firstphosphorous aluminum gallium arsenide deposition zone, a phosphorousaluminum gallium arsenide exhaust, a second phosphorous aluminum galliumarsenide deposition zone, a hydrogen/arsine mixture cool down isolationzone, a cool down exhaust, and an exit nitrogen isolation zone. Thetemperature of the substrate traveling through the reactor may beincreased while passing the entrance isolation zone, or may bemaintained while traveling through the zones, or may be decreased whilenearing the arsine cool down isolation zone.

In another embodiment, the CVD reactor may be configured to supplynitrogen to the reactor to float the substrate along the track of thereactor at the entrance and the exit. A hydrogen/arsine mixture may alsobe used to float the substrate along the track of the CVD reactorbetween the exit and entrance. The stages along the track may include anentrance nitrogen isolation zone, a preheat exhaust, a hydrogen/arsinemixture preheat isolation zone, an exhaust, a deposition zone, anexhaust, a hydrogen/arsine mixture cool down isolation zone, a cool downexhaust, and an exit nitrogen isolation zone. The temperature of thesubstrate traveling through the reactor system may be increased as ispasses the entrance isolation zone, may be maintained as is travelsthrough the deposition zone, and may be decreased as it nears the arsinecool down isolation zone.

In another embodiment, the CVD reactor may be configured to supplynitrogen to the reactor to float the substrate along the track of thereactor at the entrance and the exit. A hydrogen/arsine mixture may alsobe used to float the substrate along the track of the CVD reactorbetween the exit and entrance. The stages along the track may include anentrance nitrogen isolation zone, a preheat exhaust with flow balancerestrictor, an active hydrogen/arsine mixture isolation zone, a galliumarsenide deposition zone, an aluminum gallium arsenide deposition zone,a gallium arsenide N-layer deposition zone, a gallium arsenide P-layerdeposition zone, a phosphorous aluminum gallium arsenide depositionzone, a cool down exhaust, and an exit nitrogen isolation zone. Thetemperature of the substrate traveling through the reactor may increasewhile passing the entrance isolation zone, or may be maintained whiletraveling through the deposition zones, or may be decreased whilenearing the cool down exhaust.

In another embodiment, the CVD reactor may be configured to supplynitrogen to the reactor to float the substrate along the track of thereactor at the entrance and the exit. A hydrogen/arsine mixture may alsobe used to float the substrate along the track of the CVD reactorbetween the exit and entrance. The stages along the track may include anentrance nitrogen isolation zone, a preheat exhaust with flow balancerestrictor, a gallium arsenide deposition zone, an aluminum galliumarsenide deposition zone, a gallium arsenide N-layer deposition zone, agallium arsenide P-layer deposition zone, a phosphorous aluminum galliumarsenide deposition zone, a cool down exhaust with flow balancerestrictor, and an exit nitrogen isolation zone. The temperature of thesubstrate traveling through the reactor may be increased while passingthe entrance isolation zone, or may be maintained while travelingthrough the deposition zones, or may be decreased while nearing the cooldown exhaust.

FIG. 17 illustrates a seventh configuration 800. The CVD reactor may beconfigured to supply nitrogen to the reactor to float the substratealong the track of the reactor at the entrance and the exit. Ahydrogen/arsine mixture may also be used to float the substrate alongthe track of the CVD reactor between the exit and entrance. The stagesalong the track may include an entrance nitrogen isolation zone, apreheat exhaust, a deposition zone, a cool down exhaust, and an exitnitrogen isolation zone. The temperature of the substrate travelingthrough the reactor may be increased while passing the entranceisolation zone, or may be maintained while traveling through thedeposition zone, or may be decreased while nearing the cool downexhaust.

In one embodiment, the CVD reactor may be configured to epitaxially growa double hetero-structure containing gallium arsenide materials andaluminum gallium arsenide materials, as well as to epitaxially grow alateral overgrowth sacrificial layer containing aluminum arsenidematerials. In some examples, the gallium arsenide, aluminum galliumarsenide, and aluminum arsenide materials may be deposited at a rate ofabout 1 μm/min. In some embodiments, the CVD reactor may have athroughput of about 6 wafers per minute to about 10 wafers per minute.

In an embodiment, the CVD reactor may be configured to provide adeposition rate of one 10 cm by 10 cm substrate per minute. In oneembodiment the CVD reactor may be configured to provide a 300 nm galliumarsenide buffer layer. In one embodiment the CVD reactor may beconfigured to provide a 30 nm aluminum gallium arsenide passivationlayer. In one embodiment the CVD reactor may be configured to provide a1,000 nm gallium arsenide active layer. In one embodiment the CVDreactor may be configured to provide a 30 nm aluminum gallium arsenidepassivation layer. In one embodiment the CVD reactor may be configuredto provide a dislocation density of less than 1×10⁴ per centimetersquared, a photoluminescence efficiency of 99%; and a photoluminescencelifetime of 250 nanoseconds.

In one embodiment the CVD reactor may be configured to provide anepitaxial lateral overgrowth layer having a 5 nm deposition +−0.5 nm; aetch selectivity greater than 1×10⁶; zero pinholes; and an aluminumarsenide etch rate greater than 0.2 mm per hour.

In one embodiment the CVD reactor may be configured to provide a centerto edge temperature non-uniformity of no greater than 10° C. fortemperatures above 300° C.; a V-III ratio of no more than 5; and amaximum temperature of 700° C.

In one embodiment the CVD reactor may be configured to provide adeposition layers having a 300 nm gallium arsenide buffer layer; a 5 nmaluminum arsenide sacrificial layer; a 10 nm aluminum gallium arsenidewindow layer; a 700 nm gallium arsenide 1×10¹⁷ Si active layer; a 300 nmaluminum gallium arsenide 1×10¹⁹ C P+ layer; and a 300 nm galliumarsenide 1×10¹⁹ C P+ layer.

In one embodiment the CVD reactor may be configured to provide adeposition layers having a 300 nm gallium arsenide buffer layer; a 5 nmaluminum arsenide sacrificial layer; a 10 nm gallium indium phosphidewindow layer; a 700 nm gallium arsenide 1×10¹⁷ Si active layer; a 100 nmgallium arsenide C P layer; a 300 nm gallium indium phosphide P windowlayer; a 20 nm gallium indium phosphide 1×10²⁰ P+ tunnel junction layer;a 20 nm gallium indium phosphide 1×10²⁰ N+ tunnel junction layer; a 30nm aluminum gallium arsenide window; a 400 nm gallium indium phosphide Nactive layer; a 100 nm gallium indium phosphide P active layer; a 30 nmaluminum gallium arsenide P window; and a 300 nm gallium arsenide P+contact layer.

While the foregoing is directed to embodiments of the invention, otherand further embodiments of the invention may be devised withoutdeparting from the basic scope thereof, and the scope thereof isdetermined by the claims that follow.

1. A showerhead assembly for a vapor deposition chamber, comprising: abody comprising an upper portion and a lower portion; a centralizedchannel extending through the upper and lower portions of the body,between inner surfaces of the body, and parallel to a central axisextending through the body; a diffusion plate comprising a firstplurality of holes and disposed within the centralized channel; an uppertube plate comprising a second plurality of holes and disposed withinthe centralized channel below the diffusion plate; a lower tube platecomprising a third plurality of holes and disposed within thecentralized channel below the upper tube plate; and a plurality of tubesextending from the upper tube plate to the lower tube plate, whereineach tube is coupled to and in fluid communication with an individualhole from the second plurality of holes and an individual hole from thethird plurality of holes.
 2. The showerhead assembly of claim 1, whereinthe upper portion and the lower portion of the body each independentlycomprises at least one material selected from the group consisting ofsteel, stainless steel, 300 series stainless steel, iron, nickel,chromium, molybdenum, aluminum, alloys thereof, and combinationsthereof.
 3. The showerhead assembly of claim 2, wherein the upperportion and the lower portion of the body each independently comprisesstainless steel or alloys thereof.
 4. The showerhead assembly of claim1, further comprising a gaseous inlet disposed on the upper portion ofthe body.
 5. The showerhead assembly of claim 4, further comprising aplate disposed on an upper surface of the upper portion of the body, andthe gaseous inlet is disposed on the plate.
 6. The showerhead assemblyof claim 5, wherein the plate comprises a material selected from thegroup consisting of steel, stainless steel, 300 series stainless steel,iron, nickel, chromium, molybdenum, aluminum, alloys thereof, andcombinations thereof.
 7. The showerhead assembly of claim 5, wherein theplate comprises an inlet port extending through the plate.
 8. Theshowerhead assembly of claim 7, wherein the gaseous inlet comprises aninlet tube extending through the inlet port, and a nozzle is coupled toone end of the inlet tube and disposed above the plate.
 9. Theshowerhead assembly of claim 1, wherein an upper surface of the upperportion of the body comprises a groove which encompasses the centralizedchannel, and the groove comprises an O-ring.
 10. The showerhead assemblyof claim 1, wherein the diffusion plate is disposed on a ledgeprotruding from side surfaces of the body within the centralizedchannel.
 11. The showerhead assembly of claim 1, wherein the pluralityof tubes comprises from about 500 tubes to about 1,500 tubes.
 12. Theshowerhead assembly of claim 11, wherein the plurality of tubescomprises from about 800 tubes to about 1,000 tubes.
 13. The showerheadassembly of claim 1, wherein each tube has a length within a range fromabout 0.5 cm to about 2 cm.
 14. The showerhead assembly of claim 13,wherein the length is within a range from about 0.8 cm to about 1.2 cm.15. The showerhead assembly of claim 1, wherein each tube comprises adiameter within a range from about 0.005 inches to about 0.05 inches.16. The showerhead assembly of claim 15, wherein the diameter is withina range from about 0.01 inches to about 0.03 inches.
 17. The showerheadassembly of claim 1, wherein the tubes are hypodermic needles.
 18. Theshowerhead assembly of claim 1, wherein the tubes comprise a materialselected from the group consisting of steel, stainless steel, 300 seriesstainless steel, iron, nickel, chromium, molybdenum, aluminum, alloysthereof, and combinations thereof.
 19. The showerhead assembly of claim18, wherein the upper portion and the lower portion of the body eachindependently comprises stainless steel or alloys thereof.
 20. Theshowerhead assembly of claim 1, wherein each hole of the first pluralityof holes has a larger diameter than each hole of the second plurality ofholes or each hole of the third plurality of holes.
 21. The showerheadassembly of claim 1, wherein each hole of the second plurality of holeshas the same diameter or substantially the same diameter as each hole ofthe third plurality of holes.
 22. The showerhead assembly of claim 1,wherein the diffusion plate comprises a material selected from the groupconsisting of steel, stainless steel, 300 series stainless steel, iron,nickel, chromium, molybdenum, aluminum, alloys thereof, and combinationsthereof.
 23. The showerhead assembly of claim 22, wherein the diffusionplate comprises from about 20 holes to about 200 holes.
 24. Theshowerhead assembly of claim 23, wherein the diffusion plate comprisesfrom about 40 holes to about 60 holes.
 25. The showerhead assembly ofclaim 23, wherein each hole of the diffusion plate comprises a diameterwithin a range from about 0.005 inches to about 0.05 inches.
 26. Theshowerhead assembly of claim 25, wherein the diameter is within a rangefrom about 0.01 inches to about 0.03 inches.
 27. The showerhead assemblyof claim 1, wherein each of the upper tube plate and the lower tubeplate independently comprises a material selected from the groupconsisting of steel, stainless steel, 300 series stainless steel, iron,nickel, chromium, molybdenum, aluminum, alloys thereof, and combinationsthereof.
 28. The showerhead assembly of claim 27, wherein each of theupper tube plate and the lower tube plate independently comprises fromabout 500 holes to about 1,500 holes.
 29. The showerhead assembly ofclaim 28, wherein each of the upper tube plate and the lower tube plateindependently comprises from about 800 holes to about 1,000 holes. 30.The showerhead assembly of claim 28, wherein each hole of the upper tubeplate or the lower tube plate independently comprises a diameter withina range from about 0.005 inches to about 0.05 inches.
 31. The showerheadassembly of claim 30, wherein the diameter is within a range from about0.01 inches to about 0.03 inches.
 32. The showerhead assembly of claim1, wherein the upper tube plate and the lower tube plate eachindependently comprises a gaseous hole density within a range from about10 holes/in² to about 60 holes/in².
 33. The showerhead assembly of claim1, wherein an upper surface of the upper portion of the body is ametallic plate.
 34. The showerhead assembly of claim 1, furthercomprising a temperature regulation system, wherein the temperatureregulation system comprises a fluid passageway extending within thebody, the temperature regulation system comprises an inlet and an outletcoupled to and in fluid communication with the fluid passageway, and theinlet and the outlet are independently coupled to and in fluidcommunication with a heat exchanger.
 35. The showerhead assembly ofclaim 1, wherein the showerhead assembly is a modular showerheadassembly configured to be positioned within a CVD reactor system. 36.The showerhead assembly of claim 1, wherein the body has a rectangulargeometry or a square geometry.
 37. The showerhead assembly of claim 1,wherein the upper portion of the body comprises a flange extending overthe lower portion of the body.
 38. A showerhead assembly for a vapordeposition chamber, comprising: a body comprising an upper portion and alower portion; a centralized channel extending through the upper andlower portions of the body, between inner surfaces of the body, andparallel to a central axis extending through the body; an upper tubeplate comprising a first plurality of holes and disposed within thecentralized channel below the diffusion plate; a lower tube platecomprising a second plurality of holes and disposed within thecentralized channel below the upper tube plate; and a plurality of tubesextending from the upper tube plate to the lower tube plate, whereineach tube is coupled to and in fluid communication with an individualhole from the first plurality of holes and an individual hole from thesecond plurality of holes.
 39. An exhaust assembly for a vapordeposition chamber, comprising: a body comprising an upper portiondisposed on a lower portion; a centralized channel extending through theupper and lower portions of the body, between inner surfaces of thebody, and parallel to a central axis extending through the body; anexhaust outlet disposed on the upper portion of the body; a diffusionplate comprising a first plurality of holes and disposed within thecentralized channel; an upper tube plate comprising a second pluralityof holes and disposed within the centralized channel below the diffusionplate; a lower tube plate comprising a third plurality of holes anddisposed within the centralized channel below the upper tube plate; anda plurality of tubes extending from the upper tube plate to the lowertube plate, wherein each tube is coupled to and in fluid communicationwith an individual hole from the second plurality of holes and anindividual hole from the third plurality of holes.
 40. The exhaustassembly of claim 39, further comprising a plate disposed on an uppersurface of the upper portion of the body, and the exhaust outlet isdisposed on the plate.
 41. The exhaust assembly of claim 40, wherein theplate comprises a material selected from the group consisting of steel,stainless steel, 300 series stainless steel, iron, nickel, chromium,molybdenum, aluminum, alloys thereof, and combinations thereof.
 42. Theexhaust assembly of claim 40, wherein the plate comprises an exhaustport extending through the plate.
 43. The exhaust assembly of claim 42,wherein the exhaust outlet comprises an exhaust tube extending throughthe exhaust port.
 44. The exhaust assembly of claim 43, wherein anexhaust nozzle is coupled to one end of the exhaust tube and disposedabove the plate.
 45. The exhaust assembly of claim 39, wherein an uppersurface of the upper portion of the body comprises a groove whichencompasses the centralized channel, and the groove comprises an O-ring.46. The exhaust assembly of claim 39, wherein the diffusion plate isdisposed on a ledge protruding from side surfaces of the body within thecentralized channel.
 47. The exhaust assembly of claim 39, wherein theupper tube plate and the lower tube plate each independently comprises amaterial selected from the group consisting of steel, stainless steel,300 series stainless steel, iron, nickel, chromium, molybdenum,aluminum, alloys thereof, and combinations thereof.
 48. The exhaustassembly of claim 39, wherein the upper tube plate and the lower tubeplate each independently comprises from about 5 holes to about 50 holes.49. The exhaust assembly of claim 48, wherein the upper tube plate andthe lower tube plate each independently comprises from about 10 holes toabout 20 holes.
 50. The exhaust assembly of claim 48, wherein each holeof the upper tube plate and each hole of the lower tube plateindependently comprises a diameter within a range from about 0.1 inchesto about 0.4 inches.
 51. The exhaust assembly of claim 39, wherein theupper tube plate and the lower tube plate each independently comprises agaseous hole density within a range from about 5 holes/in² to about 30holes/in².
 52. The exhaust assembly of claim 39, wherein the showerheadassembly is a modular showerhead assembly configured to be positionedwithin a CVD reactor system.